VQ5000

Note2) See page 35 for details on external pilot specifications.

Pilot Operated

19.5 19.5 22.5 34 43 47 29 37 43 14 17 20 3.5 4.5 4.5 28 35 42 63 80 90 44.5 51.5 60 104 (110.5) 24 29 33 71.5 78 92 115.5 (122) 133 (140.5) ( ) denotes the value for N.O.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

[Unit: mm] Strip the cable sheath of the clamped area. cutter Cable Cable clamp Earth plate (A, B) cable 40 External conductor Clamp section diagram Dimensions [Unit: mm] [Unit: mm] Earth plate Clamp section diagram 25 hole 17.5 installation hole 30 24 L or less 10 B 0.3 C A 6 -0.2 0 35 11 3 24 + 0.3 0 7 6 22 (Note) M4 screw 35 Note. Screw hole for grounding.

Digital Flow Switches

Lead wire (Refer to page 35.)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note2) See page 35 for details on external pilot specifications.

Thermo-chiller

V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option) (Only 200 V as an option) Indoor use Electrical box

CLA

Y. 44 M14X l .5 M18X l .5 M\8X l .5 M22Xl.5 M26X1.5 , 50 -600 20-600 32 35 70 108 Y. Y. 52 63 ! -600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

CG5-S

depth 8 5.5 10 3.5 M10 x 1.25 35.5 85 125 40 to 800 1/8 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 93 143 50 to 1200 1/4 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 167 109 63 to 1200 1/4 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 167 109 80 to 1400

JXCx-OMU0004

/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700 40 700 8 35 800 45 800 45 800 50 800 9 40 900 50 900 50 900 60 900 10 45 1000 55 1000 55 1000 70 1000 11 50 1200 60 1200 60 1200

Programless controller Step motor (servo 24 VDC)

LEHF10 LEHF20 LEHF32 LEHF40 speed acceleration speed acceleration speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15 200 15 200 3 20 300 20 300 20 300 20 300 4 25 400 25 400 25 400 25 400 5 30 500 30 500 30 500 30 500 6 35 600 35 600 35 600 35 600 7 40 700 40 700 40 700

CS1

Lube Non-lube Air-hydro to 1000 1/2 3/4 M14 X 1.5 M30 X 1.5 15 27 31 16 43 14 36 90 59 128 50 47 161 35 98 to 1200 M16 X 1.5 M36 X 1.5 30.5 36 17 18.5 14 43 59 144 40 90 182 56 53 106 39 3/4 to 1200 M18 X 1.5 M40 X 1.5 41 35 20 17 18.5 70 48 115 204 162 45 60 63 111 39 3/4 1 to 1200 M20 X 1.5 M45 X 1.5 20 46 35 18.5 17 48 115 74 50 60 226 182 63 111 39 Lube Non-lube to 1200 M24 X 1.5 41.5

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series . 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

High Purity Fluoropolymer

For procedure to set the tubing, refer to J type procedure. 35 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Assemble fittings following the procedure shown below.

CC

ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 1/2 148.5 103.9 45 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 1/2 148.5 57 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 1/2 57 CCVL02

Air Slide Table

With shock absorber (20): MXQR20(L)-BS, BT, B, JS, JT, J Extension stroke end shock absorber 46.5 46.5 0.5 0.5 13 Max. 35 Max. 54 16 Stroke Adjustable Range (mm) 43 Extension stroke end 35 Retraction stroke end 35 Retraction stroke end shock absorber Other dimensions are the same as those for mounting the adjuster on the right side.

Mini Free Mount Cylinder

l M5 x 65 l M5 x 70 l M5 x 75 l C D CUJS12-5 -10 -15 -20 -25 -30 CUJS16-5 -10 -15 -20 -25 -30 CUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CUJB12-5 -10 -15 -20 -25 -30 CUJB16-5 -10 -15 -20 -25 -30 CUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 25 30 35 40 45 50 25 30 35 40 45 50 30 35 40 45 50 55 60 65 70 75 20 8.5 8.5 M4 x 20 l 7.5 9.5 25 M4 x 25 l 10.5 7.5 25 M5 x 25 l With Auto Switch (Built-in

New

35 40 40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66 1/4, 3/8 1/2 3/4 1 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) Bracket mounting a b e f g h i j 56 56 70.5 70.5 Port size P Model a1Note) d 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 52 60 68 73 75 75 92 92 30 34.5 39 41 2.3 2.3 2.3 2.3

10

40 40 9.5 12 12 15 20 22 24.5 24.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 Electrical entry Grommet Grommet (with surge voltage suppressor) Port size P Size Conduit terminal DIN terminal S R 1 2 Q 42 (47.5) 53.5 (61.5) 58 (66) 61 R 30 32.5 35 35 Q R 64.5 67 69.5 69.5 Q R Q 52.5 55 57.5 57.5 S T 99.5 102 104.5 104.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 28.5 (34) 39.5 (47.5) 44.5 (52.5) 47.5 34 (39.5)

Series KV2 Fittings

(g) Bag/Box Quantity M 5/32 5/32 1/4 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 1/2 1/2 5/8** 1/8-27 1/4-18 1/8-27 1/4-18 3/8-18 1/8-27 1/4-18 3/8-18 1/2-14 1/8-27 1/4-18 3/8-18 1/2-14 1/2-14 KV2F03-34 KV2F03-35 KV2F07-34 KV2F07-35 KV2F07-36 KV2F11-34 KV2F11-35 KV2F11-36 KV2F11-37 KV2F13-34 KV2F13-35 KV2F13-36 KV2F13-37 KV2F15-37 14.29 17.46 14.29 17.46 22.23 17.46 17.46 22.23 23.81 22.23 22.23 22.23

Brake mechanism added

(n 2) (n = 2, 3, 4, ) 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) 2 n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 75 80 90 (Different surfaces) (Same surface) 20 55 75 80 90 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (