3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Air Cylinder

zHs B zHt zHt 56 34 B A 33 D-A336 HW B zHs Auto switch zHs 14 B A 33 D-F536 B D-A44C G1/2 (Applicable cable O.D.) 6.8 to 11.5 A 49.5 A 49.5 HW 36 B zHs D-P3DW 29 A Auto

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CLQ

175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D

Compact Cylinder with Lock Series CLQ

175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D

CLQ

175 M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 150l x 175l 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 M6 x 90l 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 M10 x 110l -10D -15D -15D -15D x 95l x 115l Data -15D

JXCx-OMU0004

LEHZ 3 5mm/s LEHZ10 LEHZ16 LEHZ2025 LEHZ LEHZ 32 40 6 2(3) 6 3(4) 16 11 52 84 10 4 10 5.5 28 19.5 91 147 [N] 14 6 14 8 40 28 130 210 *LEHZ1016 30%F.S.LEHZ2025 25%F.S.LEHZ32 40 20%F.S. * (LEHZJ ) 53 No.JXC-OMU0004-A LEHF LEHF10 LEHF20 LEHF32 LEHF40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15

5 Port Solenoid Valve

Plug Lead Manifold Bar Base Plug Lead Single Unit Dimensions Formula L1 = 8.5n + 38, L2 = 8.5n + 93.7 n: Station (Maximum 32 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 L1 L2 L3 L4 55 63.5 72 80.5 89 97.5 106 114.5 123 131.5 140 148.5 157 165.5 174 182.5 191 110.7 119.2 127.7 136.2 144.7 153.2 161.7 170.2 178.7 187.2 195.7 204.2 212.7 221.2 229.7 238.2 246.7 137.5 150 150 162.5

mb1

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to

70astamb1

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

PF2A/PF2W

+0.5 0 6.4 Brown 6 2 + Blue ISA2 5 1 12 to 24 VDC 1 2 3 4 IS Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white wire of the sensor to .

CNA

Standard Strokes/ MXW Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) MXP 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 MG 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 MGP Stopping Accuracy MGQ Unit: mm MGG Operating piston speed (mm/s) Style of locking MGC 100 300

Air Catch Sensor Series ISA

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.0 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.0 0.6 0.4 0.5 mm 0.5 0.25 mm Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4

CNA

Standard Stroke DBore size (mm) Standard stroke (mm) Long stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 201200 80: 1400 100: 1500 80, 100 Data Long stroke applies to the axial foot style and the

CNA

Standard Stroke DBore size (mm) Standard stroke (mm) Long stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 201200 80: 1400 100: 1500 80, 100 Data Long stroke applies to the axial foot style and the

Profile Design ISO/VDMA Air Cylinder Series CP95

See page 11 for dimensions Mounting accessories, rod GKM KJ JA Rod clevis DIN 71752 Piston rod ball joint DIN 648 Floating joint bore Supplied with bolts and safety devices 32 40 50 63 80 100 GKM 10-20 GKM12-24 GKM16-32 GKM16-32 GKM20-40 GKM20-40 KJ10 D KJ12 D KJ16 D KJ16 D KJ20D KJ20D JA30-10-125 JA40-12-125 JA50-16-150 JA50-16-150 JAH50-20-150 JAH50-20-150 See page 18 for dimensions See

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 79 (53) 63 (37) 81 (55) 84 (58) 0.36 0.12 0.46 0.35 0.12 0.46 2 position 5 port Base mounted 0.33 0.39 0.12 0.10 0.47 0.59 [0.40] 0.46 0.31 0.12 0.47 0.36 0.58 [0.32] M5 x 0.8 M5 x 0.8 (with sub-plate) 0.43 [0.33] 0.32 0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63