Compressed Air Cleaning Filter Series

X 37 Y 32 Z 41 AFF2C AFF4C AFF8C AFF11C AFF22C 10 99 63 20 63 10 1/8, 1/4 158 14 113 76 20 76 10 190 66 24 8 6 6 12 6 10 40 66 80 28 5 2 27 37 36 41 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 32 37 42 41 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 37 37 43 41 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25.5 28.5 32.5 MU DL1 + Stroke A1 + 2 (Stroke) -X Foot Style Bore size (mm) Stroke range (mm) 12 16 20 25 Y X LZ LY LX LT LS LH LG LD L B A 205 to 30 4.5 8 44 29.5 34 2 20.4 17 2.8 4.5 13.5 32.4 59.4 5 to 30 5 8 48 33.5 38 2 24 19 2.8 4.5 13.5 36 63 Data 5 to 50 5.8 9.2 62 42 48 3.2 26 24 4 6.6 14.5 38 67 5 to 50 5.8 10.7 66 46 52 3.2 24 26 4 6.6 15 39 69 Foot bracket material: Carbon steel

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Port side Secure the minimum bending radius of the auto switch C lead wire before use (Refer to page 24).

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10%

5 Port Solenoid Valve

VQC 4/5 VQC 4/5 VQZ SQ VFS + 24 V + 24 V VFR Power supply for output Power supply for output 0 V 0 V VQ7 Power supply for control/input Power supply for control/input + 24 V 24 V 4. Do not install in places where it can be used as a foothold. Applying any excessive load such as stepping on the product by mistake or placing a foot on it, will cause it to break. 5.

DOC1023125

Setup communication cable part number (with A-miniB type USB cable): JX-CT-E PC 120.3 120.3 mm mm Electric actuator 200 200 mm/s mm/s Setup communication cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 USB cable A-miniB type PC is prepared by the user. ..

1.1

HRGC001--K HRGC002--K HRGC005--K Applicable model Contact input or PNP open collector input (voltage at OFF: 24 VDC; current at ON: 35 mA or less) External switch signal input External switch power output Power supply voltage 24 VDC 10% 5 W to 20 W Thermo-cooler side Customers equipment side 24 VDC 24 VDC 11 External switch power output Circuit configuration diagram 12 24 COM 13 24 VDC 24

LG1H

Note 2) For interface use, supply 24 VDC 10% 200 mA using an external source. 200 mA is the value when all I/O command signals are used and reducing the number of inputs/outputs can decrease current capacity. Refer to Operation Manual for required current for interface. Note 3) The failure (ALM) is ON during normal conditions.

Thermo-chiller

output signal 3: TEMP READY signal (Default setting) 14 Contact output signal 3 COM 24 VDC 15 24 VDC output 16 24 COM output 24 COM *1 The pin numbers and output signals can be set by the customer.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

Cylinder with Turntable Series MGT

200 P = 0.5 MPa m MGTL63 P = 0.5 MPa 100 MGTM63 100 Load mass m (kg) Load mass m (kg) Larger than 100st Larger than 50st 50 40 50st or smaller 75, 100st 30 20 50 25, 50st 40 10 l 30 5 4 3 m 20 2 10 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) 300 300 200 MGTL80 P = 0.5 MPa 200 MGTM80 P = 0.5 MPa 100 Load mass m

JXCx-OMU0004

LEY40CLEYG40C 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 24 200 12 200 6 200 1 32 300 20 300 10 300 2 40 400 35 400 14 400 3 48 500 50 500 18 500 4 56 600 65 600 24 600 5 64 700 80 700 30 700 6 80 800 95 800 36 800 7 100 900 110 900 42 900 8 150 1000 140 1000 48 1000 9 200 1200 170 1200 55 1200 10 250 1400 200 1400 65 1400 11 300 1600 230 1600 75 1600 12 350 1800 260 1800 100 1800

Support Guide/11-LEFG Series

L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 60 Model Selection (11-)LEFG Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor Clean Room Specification * This graph shows the amount of allowable

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

V Grommet IC circuit Water resistant (2-color indication) With diagnostic output (2-color indication) F79F IC circuit 5 V,12 V 3-wire (NPN equivalent) A96V A96 IC circuit 5V 12 V Grommet A72H A72 200 V 100 V A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less Relay, PLC 2-wire A73C A80C A79W 24 V Connector IC circuit 5 V,12 V 24 V or less DDiagnostic indication (2-color

Electric Actuator / Slider Type 《 AC Servo Motor 》

(>1000 stroke) Stopper type home position return stopper time (msec) PT10 100 200 Stopper type home position return torque limit value (%) PT11 15 24 Regenerative option PA02 0 0 (Non)/0002 (LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1 (+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 *1.

15

1 y, z + A = 200 y, z + A = 300 1 y, z + A = 200 0.1 y, z + A = 300 0.01 0.1 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

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Rating symbol DC 24 VS V100-61-5-05 24 VDC DC 12 VS V100-61-5-06 12 VDC 100/110 VS V100-61-4-01 100 VAC 200/220 VS V100-61-4-02 200 VAC 100/110 VS V100-61-4-01 110 VAC 200/220 VS V100-61-4-02 220 VAC 240 VS V100-61-4-07 240 VAC With Light/Surge Voltage Suppressor Rated voltage Part no.