LEC-OM069xx

P3 Synchronous communications enabled. Both synchronous and asynchronous commands can be used. 3 8-4 8 MECHATROLINK-II Commands 8.1.4 Terminology (1) Transmission Cycle and Communications Cycle Transmission Cycle: The transmission cycle is the cycle in the MAC (Media Access Control) layer. It is the communications cycle for physically sending data to the transmission path.

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Common Supply Regulator

Domensions Plate thickness AR20M/30-MD: Max.3.5 AR40-D: Max.5 Dimensions Optional specifications Round type pressure gauge (Semi-standard:Z) Round type pressure gauge (with color zone) Standard specifications Round type pressure gauge Model P1 P2 P3 A BNote 1) C D F J K L1 H J H J H J AR20M-D 1/81/4 1/8 1/81/4 40 66.8 26.5 21 M28X1 26 2 9 37.5 62.5 37.5 63.5 37.5 63.5 AR30M-D 1/43/8 1/8 1

ITV_D-E

O PERATI O N M AN U AL E/P REGULATOR M O D EL N AM E ITV1000, ITV2000, ITV3000 series Seri es CO N TEN TS Cont ent s P1 Saf et y i nst ruct i ons P2 H andl i ng precaut i ons P3 Speci f i cat i ons P4 W i ri ng m et hod P5 Pressure set t i ngs P6 Error i ndi cat i ng f unct i on P6 U RL ht t p: //w w w . sm cw orl d. com 1 Saf et y i nst ruct i ons These saf et y i nst

Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint MQR MQR MQR MQR Series Series Series Series

Air leakage Air leakage to naighoring port more than allowable lekage(P3). 1) Galling of sliding part Replace the rotary joint. Refer Rotation failure above. Increased rotation resistance. This leads to wear out fixed O ring due to sleeve rotating. 2) Galling of sliding Replace the rotary joint. Refer Rotation failure above. part increased rotation resistance.

Controller for electropneumatic pressure regulator Series IC

Step Step Step Step Step Step Preset output pressure 20 1 2 3 5 P4 P3 P2 P1 Analog signal Analog signal Controller Time Actuator Electropneumatic Actuator Electropneumatic pressure regulator pressure regulator PWR ERR 0-10VDC Series ITV 4-20mA Series IC Series IC Series IC Coming out in Coming out in July, July, 4 point pressure switch function 4 point pressure switch function 4 point pressure

Water-cooledThermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub 9 (Male receptacle) P2: Serial RS-485 D-sub 9 (Female receptacle) P1: Contact input/output D-sub 25 (Female receptacle) Power cable entry Rear side 116 Common Specifications Series HRW Operation Display Panel q Description No.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Elbow ø1/8" One-Touch Fitting, Option: -

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø5/32" One-Touch Fitting, Option: Screwdriver Handling

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø4mm One-Touch Fitting, Option: Bracket for Single

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Elbow ø1/8" One-Touch Fitting, Option: -

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Locking Type, Tool Required, Semi-Standard, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø5/32" One-Touch Fitting, Option

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø4mm One-Touch Fitting, Option: B+K

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø1/8" One-Touch Fitting, Option: -

Clean Air Module

Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1 P2 P3

Manifold Regulator Modular Type ARM2500/3000 Series

Weather resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 KA00892 KA00904 12 Valve O-ring NBR 6 1 O-ring 11.5 x 8.5 x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3

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Flow Rate and Effective Sectional Area Note) Use caullon with soft nylon or polyurethane at maximum operating pressures. ,< , AI'Ipj;30f , Modil .A$P3;IDF " . 111iR,d30F ,. ';'A,pP4:?cF , 06, a8 010 0 10 012 rv,iIljme:tersi~e 06 08 08 01 /4" Tube out&ide . Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow .

RSH

be rotated in 360(4 positions every 90) depending on desired stopping direction. (20 rotatable in 180, 2 positions only.) 90 Flange side Axial direction LOption POversized piston rod With cancel cap With lever detection switch With locking mechanism V m/min Bore size(mm) Rod dia(mm) 20 14 Work W Work W Work W Cancel cap ON OFF 32 20 Work W Work W 50 32 63 40 80 50 Lever detection switch P3

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.