Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 1/8" 10 25 11.5 10 21 1/8" 31.5 15 35 16.5 14 14 1/4" 29 1

Vacuum Unit

3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

Thermo-chiller

Nil None A With caster adjuster-foot B With earth leakage breaker K Note) With uid ll port W Water-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRS100-W -20HRS150-W -20Cooling method Water-cooled refrigeration Refrigerant R410A (HFC

Slider Type Ball Screw Drive/11-LEFS Series

plug connector*3 MJ LECPMJ*2 *3 !

VQ4000

1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) Power consumption (Current) 110 VAC Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 1 (P) 5 (R1) 3 (R2) 200 VAC Inrush 2.4 VA (12 mA), Holding

C85

1 w e !3 !

C85

8 Nickel plating C8520/25 Air cushion @3 !3 @2 !9 @0 o y !6 @1 u q r e !0 t !7 !5 !2 !4 !8 i w !

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Double acting 3. Double acting with spring Vm/min -X Transferred article W Transferred article W Transferred article W Transferred article W Bracket Cancel cap Auto switch capable 20Mounting is possible with no protrusion from the body surface.

Digital Flow Switch ( compatible)

) U16 0 Y Setting range 0 to 999 2 R/W 1st letter (left end) U8 0 Y 1 R/W 2 R/W 2nd letter U8 0 Y 3 R/W 3rd letter U8 0 Y Line name letter 4 R/W 4th letter U8 0 Y Refer to "Line name: communication data".

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

C1 = C D1 = (mm) L2 max Y D2 Size (mm) 10 D1 X L1 max Y 1 3 Size 2 to 8 C1 L1 = 10 15 3 Y 1.5 2 to 14 X 1 3 to 4 3 to 9 Y = C2 L2 = 15 20 3 to 4 Y 1.5 3 to 18 X 1.5 3 to 5 3 to 10 X = D2 = 20 30 3 to 5 Y 2 3 to 20 X 1.5 3 to 6 3 to 13 C2 = C 30 40 3 to 6 Y 4.5 3 to 22 X 2 3 to 8 6 to 15 Symbol: A7 The long shaft can be further shortened by machining it into a stepped round shaft with male

Digital Flow Switch ( compatible)

) U16 0 Y Setting range 0 to 999 2 R/W 1st letter (left end) U8 0 Y 1 R/W 2 R/W 2nd letter U8 0 Y 3 R/W 3rd letter U8 0 Y Line name letter 4 R/W 4th letter U8 0 Y Refer to "Line name: communication data".

•

Y I w l.8 ),8 ).8 U04 4 .8 1.6 OOU U06 6 2.5 7 , " ~u< U08 8 2.5 7 < 2 1 3 3 Ul0 10 12 4 --'~ 7.7 12 (mm) ZP1: 13 4 13 7.7 12 ZP16 1 16 4 13 8.2 ' 12.5 3.5 Part No.

A

1 Drain Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT

PFxx-OMX0002

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

Series AP500

Number Port No code MPA w q AP1410T e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 3) Pressure gauge unit MPa or psig/bar selectable.

V

I T C H E S Reed D-90 (DC Only) D-97 (w/LED, DC Only) A-90A (AC or DC) D-93A (w/LED, AC or DC) Solid State D-F9N (W/LED, 3 Wire NPN) D-F9P (W/LED, 3 Wire PNP) D-F9B (W/LED, 2 Wire) N O O F S W I T C H E S 2 Switches S 1Switch Safety Note For cap type mounting, care should be taken not to exceed 6 bar when ejecting the workpiece Courtesy of Steven Engineering, Inc. !

Digital Flow Switch (Integrated display type) ( compatible)

13.6 2.7 depth 12 PF3W740 1/2, 3/4 98 71 38 68 48.6 19.2 28 49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 42 63 48 28 18 3.5 depth 14 Bracket dimensions Symbol Symbol Piping port size G GG Model Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W704 3/8 20.9 23.9 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W720 3/8, 1/2 20.9, 23.9 23.9, 26.9 PF3W740 34 30 42 48 58 4.5 5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.

HRX-OM-I051

Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation location and maintenance work area . 3-5 3.3 Procedure for Installation . 3-6 3.3.1 Installation . 3-6 3.3.2 Procedure for system securing (1) . 3-6 3.3.3 Procedure for system securing