Modular F.R.L. Pressure Control Equipment

G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type G27-10-R1 Pressure gauge Note 1) Attachments Note 3) G27-10-R1 Round type (with color zone) Square Note 2) embedded type GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Note 4) ISE35-R-25-MLA [ISE35-R-25-M

3 Port Solenoid Valve Metal Seal Series VZ200 1

M5 x 0.8 (Pilot EXH) 1 2 1 2 DIN terminal: VZ2 5-D(Z)-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (

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4/5 Port Air Operated Valve Series SYJA3000

L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 94.4 86.9 61.6 [68.6] M8 x 1 66.1 75.6 0.6 0.6 46.2 48.6 0.6 105.2 0.6 0.6 0.6 74.5 [76.7] 64.7 [66.9] 84.5 83.6 107 [111.4] 73.6 87.4 [91.8] 103.4 [107.8] 66.2 123 [127.4] 125.2 90.4 127 106.4 Max. 10 141.2 121.2 143 72.7 [79.7] Approx. 300 (Lead wire length) Pg7 Approx. 300 (Lead wire length) Applicable code O.D

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Speed Controller with Indicator

rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

VEX1

VEX3222 None With plug 2 x 4.5 (Mounting hole) L plug connector (L) M plug connector (M) M5 x 0.8 (P2) Refer to Table (1).

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C or less 15 16 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Air/Single Unit How to Order (Single Unit) VX 2 0 21 01 VX 2 2 21 01 1 G 1 G 1 1 Normally Closed (N.C.)

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

EXxx-OMO0027

(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. L/A IN and L/A OUT LEDs are OFF.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M A L1 H/DL L/LL D1 D2 L2 KC H Connection threads KK Male Branch: KPQU, KPGU (M5) KK130 Effective area mm2 D Model L TPH TPS A (M5) 2 x Applicable tubing Connection thread R M H (width across flats) Note1) Applicable tubing O.D. mm Weight g P M P DM D M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

SMC Electronic Switch Series Variations

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

HRX-OM-X071

min 15/ 23 Rated fiow of option T1 8 L/min 16 Circulating Rated fiow of option T2 8 L/min 24 fluid system Flow display range9 L/min 5 to 40 Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM) Particle filter nominal filtration rating10 m 5 Bypass valve10 Installed Tank capacity L Approx.5 Fluid outlet , fluid

IIIIIII

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

Mechanical Valves Series NVM, NVFM, NVZNI

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

VZS2000

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

60

m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position