Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type)

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: One-touch Fitting ø4mm, Elbow Type, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: M5 Female Thread, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: One-touch Fitting ø6mm, Elbow Type, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: One-touch Fitting ø6mm, Straight Type, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: One-touch Fitting ø1/4", Straight Type, Option 1: -, Option 2: -, Option 3: -

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

HRX-OM-X084

flow rate 2 / / Ma no (M ma TNN ALXX Allarm number (Allarm number maximum FLOW / / / PU P Pump output setting 3 (%) 900 Displays only when the alam is generated.

HRX-OM-W002

flow rate 2 / / Ma no (M ma TNN ALXX Allarm number (Allarm number maximum FLOW / / / PU P Pump output setting 3 (%) 900 Displays only when the alam is generated.

Intrinsically Safe Valve

wire length) (11.7) 32.5 10.5 3 x 1/8" {P(1), EA(5), EB(3) port} 32.3 0.8 15 1.6 (20) EB P EA 2 x 2.2 (For manifold gasket positioning) 27.2 (45) L-type plug connector with cover (LL) 53-SY5120-LL-01 (-F2) Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 12 14.7 L (Lead wire length) 104 Terminal type (TT) 53-SY5120-TT-01 (-F2) Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 L (Lead wire

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

125

B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

Manifold Specifications

VK Rc 1/8 Applicable solenoid valve How to Order Type 41 VZ VV5Z5 05 41 1 01 G L M D VZ54VF 4(A), 2(B) Port size P, R port thread type Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-2A Applicable individual SUP spacer assembly DXT199-35-1A Applicable interface regulator ARBZ5000-00-P Stations VFR 1(P) port Rc 1/4 02 2 stations 01 Rc1 8

Standard Combinations

OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size

SV

A, B port size (metric) A, B port size (inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch

0.4

L kit (Lead wire) P.578 VQC1000/2000 M kit (Circular connector) P.580 VQC1000/2000 Construction VQC1000/2000 Exploded View of Manifold VQC1000/2000 Manifold Optional Parts VQC1000/2000 Specific Product Precautions P.582 P.584 P.588 P.595 543 Base Mounted Plug-in Unit How to Order Manifold VQC1000 Series VV5QC 1 1 08 FD1 C6 kit F P M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in

JXCx-OMT0061CN

-206) CC-Link WDT E <> *1 (RWr)code"01-***""*** 10.1.2 (RWr RWw)(P.38) 76 - 17.

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations