VK300

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Fieldbus System

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

0.55

(A) 2 110 VAC 220 VAC 1/8 1/4 AC L With light/surge voltage suppressor 3.8 1 (P) 3 (R) 240 VAC N.O. DIN (EN1753 01-803) terminal (A) 2 VP500 1 (P) 3 (R) External pilot N.C. 1/4 3/8 P. 8 8.8 Push-turn locking lever type (A) 2 1 (P) 3 (R) Conduit terminal VP700 X N.O.

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

Secondary Batteries

P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35 P.36 P.37 Reed Auto Switch Direct Mounting Style Auto Switch Mounting Bracket Part No. 1 Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1

/

Port size 2 x P Port size Conduit terminal: T DIN terminal: D M N E (N) (M) E C C 25 32 31.5 (44) A A G1/2 L L G1/2 OUT IN OUT IN Applications B B (D) F H (D) F H K J K J 2 x P Port size Cable 6 to 12 2 x P Port size With bracket e a g d Bracket h b i (mm) Model A B C D E F H J K Port size P N.C. 1/4, 3/8 1/2 3/4 1/1 40 52 65 70 22 29.5 36 40.5 20 26 32.5 35 30 37 47.5 55 22.5 22.5 25 25

SV

1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 5

REC

Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V

E-P HYREG ® Series VY1

G NPT NPTF Command signal DC Power source/Command signal Symbol Power source voltage DC Nil 0 to 10 V 1 to 5 V 1 24 V 2 3 5 6 7 8 4 to 20 mA 0 to 20 mA 1 to 5 V 0 to 10 V 4 to 20 mA 0 to 20 mA 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate

Power Valve Precision Regulator

N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 For VEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 For VEX1 33B (FKM seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266

VK3000

S070 VQD VQD-V Plug position B port N. C. A port N. O.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Formula L1 = 19n + 12 L2 = 19n + 40 10 202 230 9 183 211 8 164 192 7 145 173 6 126 154 5 107 135 4 88 116 3 69 97 2 50 78 Symbol L1 L2 Common exhaust: VV3Z4-30 (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor 2-5.3 mounting hole 57 26.6 P = 19 21.6 n-Rc 1/8 10.5 11.5 11.5 30.3 22.3 P E PE 58 Max.10 93 Manual (Non-locking) 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4

5 Port Air Operated Valve

P R R P R 40.5 32.5 2B 2B 2B 2B 2B 33 33 97 23 81 46 65 24 4A 4A 4A 4A 4A 1/4 [1 (P), 5/3 (R) port] 5 4 x 5.5 (For mounting) (Pitch) P=27.5 1/8 (Pilot port: Upward) 28 Breathing hole (Station n) (Station 1) 1/8 [Pilot port: Lateral (-P)] 64 45.5 27 Dimensions n: Stations 20 11 12 19 18 17 16 15 14 13 2 3 n L 10 9 8 7 6 5 4 578.5 L1 L2 83.5 111 138.5 166 193.5 221 248.5 276 303.5 331 358.5

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

0.4

410.5 9 222 250 260.5 11 266 287.5 298 15 354 375 385.5 10 244 262.5 273 12 288 312.5 323 L1 L2 L3 How to Order Double check block Option VQ2000-FPG01 01 F 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil DIN rail mounting (For manifold) IN side port size OUT side port size D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations