PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

Clean Room Rodless Cylinder Series CYP ø15, ø32

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x L

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x

Mist Separator Regulator

AWM20-D AWM30-D AWM40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S G36-10-01 Rc G46-10-01 Pressure gauge Note 2) G36-10-N01 G46-10-N01 NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

Ｍ icro Mist Separator Regulator

AWD20-D AWD30-D AWD40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S Rc G46-10-01 G36-10-01 G36-10-N01 G46-10-N01 Pressure gauge Note 2) NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

Booster Regulator/Air Tank

VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option

Polyurethane Coil Tubing Series TCU

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 L x 3 + 200 3 to 40 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 52 1 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 52 L x 3 + 200 N x 20 L x 5.3

AR20-B to AR60-B

to 0.2 MPa setting G36-4-01-L G46-4-01-L Square *4 embedded type Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] NPN output, Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch *5 NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] PNP output

AIR COMBINATION

(with color zone) 0.2 MPa setting G36-4-01-L G46-4-01-L Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] Square Note2) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] embedded type 0.2 MPa setting Option NPN output Wiring bottom entry ISE35-N-25-MLAISE35-N-25-M (Switch body only)] Note 3 NPN output Wiring top entry ISE35-R-25-MLAISE35-R-25-M (Switch body only)] Note 3 Digital

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

AC Servo Motor Driver (CC-Link Type ）

. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Trouble ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F RY(n 3)B to Reserved

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

1/8 2(A) port Applicable cable O.D. 4 to 6.5 A A P = 19 20 L Dimension n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

HRX-OM-R026

min 45 (0.5MPa) Pump capacity Maximum flow rate L/min 60 Circulating fluid system Maximum lifting height m 50 Settable pressure range6 MPa 0.1 to 0.5 Minimum operating flow rate7 L/min 20 Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc1 (Symbol F: G1, Symbol N: NPT1) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Wetted material10 Stainless, Copper(

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

AC Servo Motor Driver (CC-Link Type ）

. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Trouble ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F RY(n 3)B to Reserved

VKF300

) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70

Booster Regulator/Air Tank

VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer G27-20-01 AN400-04 ANA1-04 G36-10-01 AN400-04 ANA1-04 KT-VBA22A-7 AN300-03 ANA1-03 G N S L G36-10-01 AN300-03

Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

Silencer Series AN

M5) AN110-01 (1 8 PT) AN101-01 (1 8 PT) D I M E N S I O N S SERIES NAN SILENCER S Y M B O L S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more Ambient & Fluid

30

22 24.6 28.8 D M L A D Q N O M M L L Note 1) D is maximum diameter.