VZ3000

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

Series AS-FM/AS-M/ASD-FM

D2 L1 L2 L2 Metric sizes A M1 L5 Max.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375 385.5 18 353 365 387.5 398 19 372 384 412.5 423 20 391 403 425 435.5 L1 L2 L3 L4 39

High Purity Chemical Valve

Dimensions LLAmA-mm-C Stations 4 x Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 34.5 2 x R (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n x Q 118 149 180 211 P (IN) port 2 x Q 74 111 148 185 (Max.

LG1H

) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 28 5.5 84 SMC SMC SMC SMC 8 52.5 39 3 5 11.5 6 L2 dimension DIN rail part no.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

D2 L1 L2 L2 Metric Size L5 (1) A (2) M1 Weight (g) d T Model H D1 D2 D3 L1 L2 L3 L4 Max.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Dimensions L6 D4 Universal type H D1 Applicable tubing O.D. d (Hexagon width across flats) M1 L3 A L5 L4 D3 L1 L2 D2 T Metric Size Inch Size A Model A Weight (g) Weight (g) d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23T AS131F-U10/32-01T 1/8" 8.4 3.2 8.4 19.8 19.8 17.5 12.7 17.5 12.7 28.7 10 28.7 AS131F-M5-04T AS131F-U10/32-03T 5/32" 9.3

Manifold Specifications

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 43 Series SYJ5000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ5-20PStations -00 For (Built-in one-touch fitting) N3 N7 C4 C6 Manual override L1 L2 M5 x 0.8 (A, B port)

15

Width across flats B1 MM [mm] Size B1 C1 H1 L1 L2 MM 25 22 20.5 8 36 23.5 M14 x 1.5 32 22 20.5 8 40 23.5 M14 x 1.5 63 27 26 11 72.4 39 M18 x 1.5 L1 L2 C1 H1 * The L1 measurement is when the unit is at the retracted stroke end position.

3 Port Air Operated Valve Series SYJA300 1

L2 Symbol L1 L2 Calculation formula: L1 = 26n + 24, L2 = 26n + 12 Calculation formula: L1 = 26n + 36, L2 = 26n + 10 5-5-7 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5-5-8 5 3 Port Air Operated Valve Series VTA315 How to Order SA VTA315 VA SA Port size Indicate

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

VCA

185 158 169 202 213 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry Grommet: G Conduit: C DIN connector: D Conduit terminal: T A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30

REA/REB

WB x L1 > MD Third tentative determination of bore size from the graph of maximum speed (U) and load weight (W). Determination of rotational moment WB x L1 MD (For body non-rotating accuracy and maximum allowable moment, refer to page 10-2-69.)

Air Catch Sensor Series ISA

160 76 114 5 198 114 152 6 236 152 190 Stations L1 L2 L3 63(Max. 65) 34 5 17 Detection port 19 For the bracket attachment position, refer to page 806.

Sine Rodless Cylinder Series REA/REB

WB x L1 > MD Third tentative determination of bore size from the graph of maximum speed (U) and load mass (W). Determination of rotational moment WB x L1 MD (For body non-rotating accuracy and maximum allowable moment, refer to page 999.)

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

173 185.5 175 150 17.5 185.5 175 198 210.5 200 223 L1 L2 L3 L4 137.5 162.5 187.5 171 13.5 212.5 192 15.5 118.5 14.5 139.5 16.5 160.5 12.5 181.5 14.5 Stations 11 13 14 15 16 12 235.5 225 248 260.5 250 234 285.5 275 255 248 273 L1 L2 L3 L4 237.5 213 17.5 237.5 262.5 223.5 244.5 202.5 16.5 13 15 12 14 37 5 Port Solenoid Valve Series SX3000/5000 Stations SS5X3-45GDC4 C6 Note) L1 to L4 dimensions