Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

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25 25 25 ZPY100 10 12 15 25 41 52 75 86 6 ZPV16 j6, ~16D 16 e26 42 7 '1a 53 70 +87 Applicable tube ,mm ZP20 I Applicable tube 0.0' ~ Q I>R' ZPY25 30 30 28 30 30 28 30 30 28 30 30 28 N4 (Nylon tube .4/2.5) 14.5 5 1.8 ZPY?2 , ~Y40 36 34 36 33 37 35 , 36 34 I ',ills (fIyjon tuIMIIl!

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2 A 2 Manual override 5 SY SMC 4 (L4) (L3) SYJ L2 L1 P=16 P=16 15.5 3 2 VK 1 18 VZ Station 5 D side VT 22.5 300 50.5 3 70 VT (Lead wire) Cover dia 1.6 Cross section 0.34mm2 VP VG 59 PE port R 3 1 P (30) VP 25.5 11 M5 X 0.8 External

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model ASF 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 10-32 UNF 8 33.8 30.1 29.6 10 11.7 7.8 34.6 25.1 28.8 9.6 3/16" ASD230FM-U10/32-05 35.2 23.3 16.5 14 11.4 1/4" ASD330FM-U10/32-07 32.6 20.7 13.5 15 12 34.6 14 39.6 3/16" ASD330FM-N01-05S 39.5 23.9 16.5 30 11.4 12.7 36.1 32 11.8 10.6 1/4" 27 ASD330FM-N01-07S 42.2 31.1

4/5 Port Air Operated Valve Series SYJA3000

override (30) 24.5 (37) 23 11.5 20 3 3.5 4 11 2-2.6 (For mounting) (18) 1.8 (Bleed port) With fiflter (80 mesh) (Piping port) 1/8 46.5 19.5 (25) 33.5 21.5 (2.3) (46.5) 8.5 M5 x 0.8 (Piping port) 6 6 15 17 17 R1 P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

Series AS-FM/AS-M/ASD-FM

Weight g d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 10-32 UNF 8 10 11.7 33.8 30.1 29.6 7.8 34.6 25.1 28.8 9.6 3/16" 35.2 23.3 16.5 ASD230FM-U10/32-05 14 11.4 1/4" 32.6 20.7 13.5 ASD330FM-U10/32-07 15 12 14 34.6 39.6 3/16" 39.5 23.9 16.5 ASD330FM-N01-05S 30 11.4 12.7 11.8 36.1 32 10.6 1/4" 27 42.2 25.6 31.1 NPT1/8 17 14.2 ASD330FM-N01

LEC-OM069xx

i s p l a y a n d SigmaWin+TM 2.

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Shock Absorbers and Rate Controls

t.30 13.10 ADA725 L ( o r I m d ( .98 l0 2.500 6.4 15.10 ADA73(| T . ( o r T u n d ( .98 l2 2,500 2,500 2,800,000 7.1 29.35 t7.10 ADA735 l . ( o r T o n d ( .98 ?,500 2.500 3.200.000 7.9 33.3t 19.10 ADA74() T . ( o r T q n d ( .98 t 0 ?,500 2,500 3,500,000 8.6 y.30 ?1. t0 aoa745 l . t 0 r l 0 n 0 t .98 l 8 2.500 2,000 3.900;000 9.3 4t.30 23.t0 ADA/50 T.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Air Cylinder Series CM2

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.