High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

2 Phase Stepper Motor/Without Motor Brake Series LXS

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

MXS

70 75 80 GA 22 22 22 22 55 61 102 154 190 KA M 92 92 92 102 115 156 197 255 295 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 3.11-34 Air Slide Table Series MXS Auto Switch Mounting Position for Stroke End Detection Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100

Pin Clamp Cylinder Series CKQ/CLKQ

mounting type Applicable auto switch: D-A79W D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-F7WV D-F7BAL D-F7BAVL D-F7W D-J79W D-F7NTL D-F79F D-F7V D-J79C D-F7 D-J79 [For CLKQ] [For CKQ] B A B A U U Direct mounting type Applicable auto switch: D-A9 D-A9V D-F9WV D-F9BAL D-M9V D-F9W [For CKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V

LEC-OM07605CN

LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr. PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

48

Size 20 (16 x 2) to 40 (32 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL GD 40 Bottom view WA + Stroke/2 Z 2 x P (Plug) 4 x MM depth ML 4 x OA through 4 x OB counterbore depth OL L (OL) 4 x NN through U X PW PE VA 2 x P (Plug) H R T 2 x P D GB GC S Q 2 x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN

High Power Cylinder Series RHC

/C8 type 20 to 40 D-H7/H7W/H7F/H7BAL type 20 to 40 Values inside ( ) are for D-H7LF. 50 to 63 50 to 63 Approx.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

Sine Cylinder Series REC

Auto switch type Model Features Electrical entry (Fetching direction) Applicable bore size D-C73, C76 20 to 40 Reed D-C80 Without indicator light D-B53 20 to 40 Grommet (In-line) D-H7A1, H7A2, H7B 20 to 40 Diagnostic indication (2-color indication) Solid state D-H7NW, H7PW, H7BW 20 to 40 D-G5NTL With timer For solid state auto switches, auto switches with a pre-wired connector are also

Sine Cylinder Series REC

Auto switch type Model Features Electrical entry (Fetching direction) Applicable bore size D-C73, C76 20 to 40 Reed D-C80 Without indicator light D-B53 20 to 40 Grommet (In-line) D-H7A1, H7A2, H7B 20 to 40 Diagnostic indication (2-color indication) Solid state D-H7NW, H7PW, H7BW 20 to 40 D-G5NTL With timer For solid state auto switches, auto switches with a pre-wired connector are also

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Vertical connector 2: Horizontal connector P: Positive common N: Negative common 1 2 1 2 P N D side SZ3000-40-2A-D For D-sub connector SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

VQ4000

B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting D side mounting 118 118 90 149 2-G Rc 3/4 Electrical entry 90 149 2-Rc 1/2 1(P) port 2-Rc 1/2 1(P) port U side mounting

RHC

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

Modular Type Filter Regulator Series AW

Accessories Note 3) Applicable model AWM20 to 40 AWM20 to 40 AWM30, 40 AWM20 to 40 AWM20 to 40 AWM20 to 40 Description With bracket Float type auto drain (N.C.) Note 2) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

SQ1000/2000

08 Dual flow fitting SSQ1000-52AP. 39 P. 41 P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A A A B B B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C C C D D D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

MGG

D-H7BAL D-H7 D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C Applicable bore size A Hs Hs Hs Hs A A A A A A B B B B B B B 20 30.5 27.5 27.5 27 24.5 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 45.5 29.5 25 30.5 30 30 29.5 27 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 29.5 45.5 32 31.5 33.5 33.5 33 30.5 41.5 26.5 46 28 44.5 29.5 43 28 40 25 45.5 30.5 46.5 40 36.5 38 38 37.5 35 50.5 31.5 55.5 33 53.5

VM

VHS Flame Resistant Type: 1(P)/2(A): One-touch Fitting Applicable tubing O. D.