IDG

IDG1 (Type A products group) IDG3 (Type A products group) P1 = 0.3 MPa 0 0 P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa 10 10 20 20 P1 = 0.7 MPa P1 = 0.7 MPa 30 30 40 40 4 8 12 16 0 10 20 30 40 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

Rotary Actuator

CDRB2BW10/15-=S CDRB2BW15-=D CDRB2BW20/30/40-=S/D Size 40 L 2 (3 mounting holes with the marks 0 4 -0.030 are for tightening the actuator and g6 x Q K not to be used for external mounting.) 3 x Q (CDRB2BW10) 6 x Q (CDRB2BW15) h Key dimensions L1 b P P h (h9) L1 b (h9) Model CRB2B<40 4 0 0.030 4 0 20 0.030 A port B port A A port B port A F F E A parallel key is used instead of single flat

Refrigerated Air Dryers

11) [opposite side] IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V

CM2

Please delete the unnecessary part. 1.4-14 Series CM2 Double Clevis (D) CM2D Bore size Stroke (mm) Bore Stroke range CX L NA NN RR U B1 N E A CD I CZ K P 1/8 1/8 1/8 1/4 S Z AL CI D MM ZZ CL F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 15.5 13 5 133 142 10 30 24 M20 X 1.5 9 14 15 18 9 28 19 5 62 24 8 M8 X 1.25 25 13 8 41 20 20 33.5 M10 X 1.25 1 to 300 19.5 17 6 137 146 10 30 30 M26 X

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

Rotary Actuator/Vane Type

CRA1 P P h L1 b CRQ2 b (h9) h (h9) L1 A port B port A port B port 4 0 0.030 4 0 0.030 20 MSQ A A MSZ F F A parallel key is used instead of single flat for size 40. E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

Thermo-chiller/Rack Mount Type

to 230 VAC) p. 11 Communication Functions pp. 30, 31 VOptions HRR012/018 How to Order With Electric Conductivity Control Function, Applicable to DI Water Piping p. 32 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Applicable to DI Water Piping p. 32 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Inverter Pump Mounted p. 33 Specifications High-Pressure Pump

Base Mounted Metal Seal/Rubber Seal Series VQ

5.5 9 (4(A), 2(B) port) 9 9 9 SMC 5 3-C4, M5(1(P), 4(A), 2(B) port) M5(5(R1) , 3(R2) port) 8.7 8.7 C4: One-touch fitting for 4 M5: M5 thread < >: AC 2 position double: VQ025 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B ~ = ~ = EB P EA EB EB P EA EA 23.4 mounting holes 38 31 Lead wire length = 300 121<131> M plug connector 108<118.5> L plug connector 51 (

LEC-OM02704CN

P A 11 PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

AC Servo Motor Driver (CC-Link Type ）

Driver Inrush currents (A0-p) Main circuit power supply (L1, L2, L3) Control circuit power supply (L11, L21) LECSC2-T5 LECSC2-T6 LECSC2-T7 LECSC2-T8 30 A (attenuated to approx. 3 A in 20 ms) 20 A to 30 A (attenuated to approx. 1 A in 20 ms) LECSC2-T9 34 A (attenuated to approx. 7 A in 20 ms) 12 7 13. OPTIONS AND AUXILIARY EQUIPMENT 13.

Membrane Air Dryer

purge IDG<A Series Type M, Type V How to Order Reduced M 3 A IDG 03 30 purge IDG<A Series Made to Order Refer to page 33 to 44 for details.

Electric Actuators

Dimensions [mm] Model L1 L2 A B C D E F G J 138 LEPY10m-25m 29 39 30 29 20 150 20 22 LEPY10m-50m 24 50 60 175 61.8 24 43 34 50 163 LEPY10m-75m 89 72 40 79 30 79 198 210 30 LEPY10Lm-25m 29 20 29 39 20 22 30 124 136 LEPY10Lm-50m 60 34 50 24 50 149 161 47.8 24 43 LEPY10Lm-75m 30 79 89 30 72 40 79 184 196 9 Electric Actuator/Miniature Slide Table Type Step Motor (Servo/24 VDC) Series LEPS Model

Series IDG

Inlet air pressure [MPa] Inlet air temperature [C] Allowable pressure drop P [MPa] Compressed air supply capacity Q [l/min (ANR)] Note: F = (C x 1.8) + 32 1MPa = 145psi 1l/min = 0.0353SCFM Dew point temperature conversion chart 60 0.5MPa 0.7MPa 0.9MPa 50 0.3MPa 40 Atmospheric pressure 0.1MPa Pressurized dew point temperature C 30 20 10 0 10 20 30 40 50 60 50 60 20 10 0 10 20 30 40 30 Atmospheric

KR

K KGW P. 14 M Universal male elbow P. 12 KGV H Universal male elbow allows thread connection by using a socket wrench for confined spaces. D Bulkhead connector KGE P. 18 Use to connect male thead and tube through a panel.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Rotate the pin 30 by pushing it with a wooden implement such as the grip of a wooden hammer or a resin stick. The lock of a fine lock series cylinder can be disengaged manually through the procedure described below. However, make sure to disengage the lock pneumatically before operating the cylinder.

7ND9071en

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 QB 7 RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44 9 10 30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 11 18 depth 6 12.5 8.5 40 292.5 121 25 10 45 50 98 25 110 138 24 35 171.5 132 54.5 13 20 depth 6 12.5 10 P (Piping port) Model Stroke R S T V W WB XA XB Y 30 U 5.5 Model Nil TN TF RS2H50 RS2H63 RS2H80 40 21 2 15.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators L1 Manual override L2 10 (A, B port) 1/4 P = 20.5 (Pitch) 23.5 16.5 + 11.5 + (For mounting) 4 x 4.5 53.6 40.6 100.6 (P, EA, EB port) 1/4 97.3 30 9.4 20 B B B B 38.5 51.5 38.5 EB EA P EA EB P 30 21 21 21 19 60 A A A A + + + + Applicable tubing O.D.: 8, 5/16" (A, B port) One-touch fitting Air Preparation Equipment Pressure Control Equipment Flow

JXCx-OMU0004

P.50 i 7 LED i i i j j j 7 LED [6] g 2 LED a 7 LED f g j i 2 i j 3 LED a [2]7 LED f A LED b ) g i j 3 LED a h F15 g [] A 30 No.JXC-OMU0004-A 6 1) 2) 7 LED 3) 7 LED 7 LED 4) * 7.4 P.39 7 1 k n 16 10. P.50 6 * 8 e PLC PLC 9.