.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

.020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

EXxx-OML0010CN

. & / a) (52) b) 28 c) /(16) d) e) (51) f) g) h) OFF ON i) j) (51) k) (SIDXDYDM) ON/OFF ON SI 030 (DXDYDM) 1 -17No.EX-OML0010CN-C a) (52 ) b) (28 c) /(16 ) d) e) (51 ) f) g) h) Offset binarySign & Magnitude2S Complement mA() V() Scaled mA() V() i) j) (51 ) -18No.EX-OML0010CN-C 3.

Vacuum Unit Ejector / Vacuum Pump System

Is E or F: For pressure switch for vacuum ,lead wire with connector (Length 2m) for pressure switch for vacuum G When 1.

Vacuum Unit Ejector / Vacuum Pump System

Note 7) Select F or H for (1) System/Body Type for the single unit model. -13No. ZK2-OM00201 (4) Wiring Note 8) Symbol Type L Individual wiring Note 9) F D-sub connector (25 pins) Note 10) P Flat ribbon cable connector (26 pins) Note 10) N No wiring (No valve) Note 8) Common wiring is available only solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

Wireless System

E 16 outputs D-sub connector (25 pins) F 16 outputs Spring type terminal block (32 pins) * For specifications, refer to the Fieldbus system EX600 series in the Web Catalog.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first

ITV_P-E

( di spl ayed al t ernat el y) Press Skey f or 2 seconds or m ore, t hen go out f rom det ai l set t i ng m ode. ( Sel ect t he m enu w i t h or keys, t hen j um p t o anot her i t em . ) Lock keys ( ref er t o P9) Rel at i on bet w een set t i ng and sensi t i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y D ef aul t : 13 - Zero clear The display can be reset to

AC Servo Motor Driver (MECHATROLINK-III type)

Station Address S1 S2 00H to 02H: Disabled 0 0 to 2 (Do not use these addresses.) 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled F 0 to F (Do not use these addresses.) (2) Settings of the DIP Switch S3 The following table shows the settings of the DIP switch (S3). Switch No.

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15

Electric Actuator / Slider Type 《 AC Servo Motor 》

The rubber back of the belt is softened and sticky. f. Crack on the back of the belt 41 - 7.6 How to detach and attach the dust seal band For the internal-check as the maintenance, the method of detaching and attaching the dust seal band is shown as the following. 1. Loosen the fixing bolts of end side of the Band holder.

LEJ-OM002xx

The rubber back of the belt is softened and sticky. f. Crack on the back of the belt 36 - 2. For internal check, follow the below procedure. a. Loosen the bolts of the band holder on the end side of the actuator. Please take care to not cut hand on the edges of the Dust seal band. b. Remove the Seal band pusher and the Blanking plate.

XMA/XYA Series

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

AC Servo Motor Driver (MECHATROLINK-II type)

Bit 3 of SW2 SW1 Station Address Bit 3 of SW2 SW1 Station Address OFF 0 Disabled ON 0 50H OFF 1 41H ON 1 51H OFF 2 42H ON 2 52H OFF 3 43H ON 3 53H OFF 4 44H ON 4 54H OFF 5 45H ON 5 55H OFF 6 46H ON 6 56H OFF 7 47H ON 7 57H OFF 8 48H ON 8 58H OFF 9 49H ON 9 59H OFF A 4AH ON A 5AH OFF B 4BH ON B 5BH OFF C 4CH ON C 5CH OFF D 4DH ON D 5DH OFF E 4EH ON E 5EH OFF F 4FH ON F 5FH Turn the power

XM, XY

G J K L M Indicator Without indicator Pilot port direction Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Right flange surface Left flange surface A F J

Type: Relay Device, Type: Electro-pneumatic lever type, Option: None, Pressure(MPa): 1.0, Terminal box: N/A, Pilot valve: N/A, Fork lever type fitting: N/A, Lever unit: N/A, Compensation spring: N/A, External scale plate: N/A, Position feedback signal: N/A, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: Standard product, CE compatible: CE-compliant