Multi-channel Digital Sensor Monitor ( compatible)

(The default setting is [000].) [oFF] (not use) is selected. Press the SET button to return to function selection mode. For instructions on how to enter the security code, refer to "How to input and change the security code" on page 74. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again.

Digital Flow Monitor

Display resolution E Energy saving mode Operating mode in which the digital display turns off to reduce power consumption. A code number displayed to identify the error code detected by the self-diagnostic function of the product. Refer to "Error indication function" on page 75 for details of the errors.

Multi-channel Digital Sensor Monitor

(The default setting is [000].) [oFF] (not use) is selected. Press the SET button to return to function selection mode. For instructions on how to enter the security code, refer to "How to input and change the security code" on page 69. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material Body Cap 1 2 3 4 5 6 7 8 12 Aluminum alloy Rolled steel Steel wire Stainless steel Zinc alloy Steel wire Zinc alloy Aluminum alloy NBR Cross-recessed head cap screw E type snap ring Handle Ring Lock nut Needle O-ring Replacement Parts No. Description Material Parts no.

Speed Controller: Standard Type Series AS In-line Type 1

Description Material q w e r No. Description Material Note o !0 !1 !2 NBR Brass Brass Steel O-ring Body Needle Lock nut Nipple Zinc alloy Stainless steel Brass Stainless steel Needle guide Electroless nickel plated Electroless nickel plated Black oxidized coated Handle E type snap ring Electroless nickel plated Replacement Parts No.

Speed Controller: Standard Type In-line Type AS Series

Description Material Body Cap 1 2 3 4 5 6 7 8 12 Aluminum alloy Rolled steel Steel wire Stainless steel Zinc alloy Steel wire Zinc alloy Aluminum alloy NBR Cross-recessed head cap screw E type snap ring Handle Ring Lock nut Needle O-ring Replacement Parts No. Description Material Parts no.

EXW1-NT1_eng

Este equipamento opera em carter secundrio, isto , no tem direito a proteo contra interferncia prejudicial, mesmo de estaes do mesmo tipo, e no pode causar interferncia a sistemas operando em carter primrio.

Sensor Monitor

(The default setting is [000].) [oFF] (not use) is selected. Press the SET button to return to function selection mode. For instructions on how to enter the security code, refer to "How to input and change the security code" on page 69. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again.

Digital Flow Switch (Integrated display type) ( compatible)

(The default setting is [000].) [oFF] (Unused) is selected. Press the SET button to return to function selection mode. For instructions on how to enter the security code, refer to "How to input and change the security code" on page 69. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again.

Digital Flow Switch (Integrated display type) ( compatible)

(The default setting is [000].) [oFF] (Unused) is selected. Press the SET button to return to function selection mode. For instructions on how to enter the security code, refer to "How to input and change the security code" on page 71. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again.

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

High-precision Digital Pressure Switch ( compatible)

[March 2018] E: Contents revised in several places. [June 2018] F: Contents revised in several places. [October 2018] G: Contents revised in several places. [March 2020] H: Contents revised in several places.

Digital Pressure Switch

[February 2020] E: Contents are added. [February 2021] F: Contents revised in several places. [January 2022] G: Contents revised in several places. [October 2022] H: Contents revised.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Specifications Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 0.16 dm3/(sbar) Sonic conductance of residual pressure release valve How to Order Symbol 01 AS 2 000 E Body size 2 3 4 Port size Port size Applicable series 1/8, 1/4 standard 3/8 standard 1/2 standard 01 02 03 04 1/8 1/4 3/8

20

In periodical inspections, check the following items and replace the parts if necessary. a) Scratches, gouges, abrasion, corrosion b) Air leakage c) Twisting, crushing and turning of connected tubes d) Hardening, deterioration and softening of connected tubes e) Loosening of nozzles 2.

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

G15/G27

(Full span) Stainless steel Fluid (2) G Indication precision Case Clear cover Stud GS Bourdon tube Brass Brass Glass Material PPA G43-10-01 Applicable model IP200, IP8000, IR2000, IR3000, IT2000, 4000 Be sure to read the precautions on page 663 for selection and mounting. Note 1) When mounting a pressure gauge, use caution not to tighten excessively.

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: AE (A+E)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: AEG (A+E+G)

Type: 000 (Lever Type Feedback), Pressure Gauge: 0 (None), Construction: 1 (w/Terminal Box), Accessories: EG (E+G)