4-channel Flow Monitor (Remote type monitor unit)

with applicable sensor. -38No.PF-OMH0003-F PF2D20 Model PF2D20 Applicable sensor PF2D504 PF2D520 PF2D540 Rated flow range 0.4 to 4.0 1.8 to 20.0 4 to 20 L/min L/min L/min Instantaneous Setting/display flow range 1 0.25 to 4.50 1.3 to 21.0 2.5 to 45.0 L/min L/min L/min flow Flow Min. setting/display unit 0.05 0.1 0.5 L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

DIN terminal (D,Y): 10-SYJ52MD Y-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) L plug connector (L): 10-SYJ52M-L-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65.5 [67.7] 60.9 28.1 [35.1] 53.4 Max. 10 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 75.5 74.6 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20

Digital Flow Switch

Default settings Function Default settings Page [rEF] Reference condition [Anr] Standard condition [F 0] [rEF] page 29 [Uni] Unit selection function 1 [ L] L/min [oU1] Output mode of OUT1 [HYS] Hysteresis mode [1ot] Switch operation of OUT1 [1_P] Normal output [P_1] Set value of OUT1 [100] 100 L/min [F 1] [oU1] page 31 [H_1] Hysteresis of OUT1 [ 10] 10 L/min [CoL] Display colour of OUT1

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

K L D G1/2 F K D C E C E J G J G B B WN: M12 connector D F K C J G E B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/8, 1/4 56.7 55.3 67 56.7 31.3 55.5 41.1 30 1/4, 3/8 65.6 58.3 70 65.6 34.3

SY

number L 44 16 8 Terminal no.

Digital Flow Switch (Integrated display type) ( compatible)

units are set to [G] with [F 0], the units display "L" will be turned OFF.

Digital Flow Switch (Integrated display type) ( compatible)

x103 L to to to to 1,000,000.0 1.000 x106 L 1.000.000 1.000 x106 L to to to to 10,000,000.0 10.00 x106 L 10.000.000 10.00 x106 L to to to to 99,990,000.0 99.99 x106 L 99.990.000 99.99 x106 L to to to to 999,900,000.0 999.9 x106 L 9,999,000.000 9 x106 L : The units on the right side of the sub screen will flash. : When the units are set to [G] with [F 0], the units display "L" will

Digital Flow Switch (Remote type monitor unit)

/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 NPN open collector output, PNP

VFS

3, Steel ball AXT625-3A-10 Note) A, B ports: 1/8, 1/4 3-8-51 52 Series VFS2000 Light Compact Type Sub-plate/C: 2.8 dm3/(sbar) C: 2.8 dm3/(sbar) C: 2.2 dm3/(sbar) Sub-plate Type L dimension (mm) 25.5 31 Weight (kg) 0.13 0.2 Compact type Standard type L dimension L dimension Compact type Standard type Sub-plate Compact: Plug-in, Grommet (With attachment plug lead wire) VFS200-F-(B) P01 P02

CM2

auto switch DM2 C H L 40 F A J H7BW 150 Number of auto switches Bore size Rod boot 2 pcs. 1 pc. n pcs.

Digital Flow Switch ( compatible)

L/min (2000 L type) [P_2 ] Set value of OUT2 [F 2] 3 Page 42 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type) [ 100] 100 L/min (2000 L type) [H_2 ] Hysteresis of OUT2 [dtH2] ON delay time [0.00] 0.00 s [dtL2] OFF delay time [0.00] 0.00 s [CoL ] Display colour of OUT2 [1SoG] Green when ON, Red when OFF (OUT1) [F 3] [FiL ] Digital filter setting [ 1.0

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

Digital Flow Switch ( compatible)

L/min (1000 L type) [1000] 1000 L/min (2000 L type) [P_2 ] Set value of OUT2 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type) [ 100] 100 L/min (2000 L type) [F 2] 3 Page 46 [H_2 ] Hysteresis of OUT2 [dtH2] ON delay time [0.00] 0.00 s [dtL2] OFF delay time [0.00] 0.00 s [CoL ] Display colour of OUT2 [1SoG] Green when ON, Red when OFF (OUT1) [F 3] [FiL

Digital Flow Monitor

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

Membrane Air Dryer

Symbol Type Nil Rc N F NPT Port size G 100 30 50 60 75 Port size Symbol Nil H L L S L S L S Nil H L 02 03 04 $ $ $ $ $ $ $ $ $ $ $ $ 1/4 3/8 1/2 $ $ $ $ $ $ $ $ $ $ $ $ Component equipment 100 30 50 60 75 Component equipment Nil H L L S L S L S Nil H L Mist separator AFM40 AFD40 Micro mist separator Micro mist separator regulator AWD40 Replacement Parts (Element for mist separator, micro

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

Electric Actuator

5: LEYG16 B M L Lead 5: LEYG16 AB M L Lead 10: LEYG16 AA M L 4.4 4.4 Lead 10: LEYG16 A M L 0 0 600 0 100 200 300 400 500 600 0 100 200 300 400 500 Speed [mm/s] Speed [mm/s] LEYG25 l M LEYG25 Al M L L 33 66 Lead 3: LEYG25 C M L Lead 3: LEYG25 AC M L Vertical work load [lb] Vertical work load [lb] 22 44 Lead 6: LEYG25 B M L Lead 6: LEYG25 AB M L 11 22 Lead 12: LEYG25 A M L Lead 12: LEYG25 AA

PFxx-OMX0002

99.99 x109 L 99,990,000,000 99.99 x109 L to to to to 999,900,000,000 999.9 x109 L 999,900,000,000 999.9 x109 L : The units on the right side of the sub screen will flash. : When the units are set to [ Ft] with [F 0], the units display "L" will be turned ON. -42No.PF-OMX0002-B d.

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?