ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

5-Port Solenoid Valve

direction) B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A PE X 1P 5EA 3EB Vacuum Release Valve with Restrictor 106.2 23.2 24.6 116.6 96.2 20 20 81.6 74.1 30.2 20 49.4 43.8 40.2 5.5 35 B 12 B 12 B 12 B 12 B 12 4 x 4.5 12.3 ( ) L1 L2 5 8 (For mounting) Fixed: 4.9 Replaceable: 8.5 18 (L5) 2 x M2.6 2 x 4-40 UNC [For NPT(F) thread] Metal Base Made to Order 28 6.1 34 (Station n) (Station 1)-1/4

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9.5 B 10 10.5 13 13 13.5 19 21.5 20.5 B 16.5 22 24.5 23.5 B 15 17.5 16.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BAL D-F79F D-F7NTL D-A73C

Compact Hydraulic Cylinder

27.5 B 17 19 18 23.5 A 13.5 11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 A 8 6 13 17.5 A 14 12 19 23.5 A 8.5 6.5 13.5 18 A 11.5 9.5 16 21 A 8 6 13 17.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

smcmaintenancepartslist

The element retainer shall be assembled in such a way that the symbol A-A in (a) of Fig. 6 is overlapped with symbol B-B of element retainer shown in (b) of Fig. 6 in parallel. B A B A C View of c Actuators Modular F.R.L.

Smooth Cylinder/Low Speed Cylinder

D-G5, K5, G5W D-K59W, D-G59F, D-G5NT 20 to 100 Hs D-C7, C8 20 to 63 8.5 Auto switch 12 Auto switch Hs 24.5 16 16 16 16 24.5 B 33 A B 26 A D-H7, H7W D-H7NF 20 to 63 D-C73C, C80C 20 to 63 Auto switch 8.5 Auto switch Hs 8.5 Hs B 36.7 A B 29 A D-B5, B6, B59W 20 to 100 D-H7C 20 to 63 12 Auto switch Hs Hs 8.5 Auto switch B 38.2 A B 33 A Auto Switch Proper Mounting Position Auto Switch Mounting

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Hydraulic

U D-A79W D-F7WV D-F7V D-F7BAVL A B A B Proper auto switch mounting positions (mm) D-A7H, D-A80H D-A73C, D-A80C D-F7 D-F7V D-F7W, D-F7WV D-J79 D-J79C, D-J79W D-F7BA D-F9 D-F9V D-F9W D-F9WV D-A7 D-A80 D-A9 D-A9V D-A79W D-F7NTL D-F7F D-F9BAL Bore size (mm) A B A A A A B A A A B B B B B B 20.5 11.5 21 18 25 26 12 9 16 17 20 27 20 27.5 24.5 31.5 26 19 30 29 32.5 20.5 17.5 24.5 23 22 25.5 32

Table of Contents

B C D J K Y A J K B Y C D Misc.

5

MQ D-G5, K5, G5lW D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8 20 to 63 RHC 8.5 Auto switch 12 Auto switch Hs Hs RZQ 24.5 16 B 33 A B 26 A D-H7l, H7lW D-H7NF 20 to 63 D-C73C, C80C 20 to 63 8.5 Auto switch 8.5 Auto switch Hs Hs 16 16 B 29 A B 36.7 A D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 12 Auto switch Hs 8.5 Auto switch Hs 24.5 16 B 38.2 A B 33 A (mm) Auto Switch Mounting Height Auto Switch

Table of Contents

Dust-protecting Filter Set/Dimensions (A) (20) (20) (B) (10) Part no.

AC Servo Motor Driver (Pulse input type/Positioning type ）

frame 10 A 20 Note 1.

CQ2

19 21.5 20.5 B 16.5 22 24.5 23.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 14 17 20 20 22.5 17.5 15.5 18 B 14.5 15 17.5 17.5 18 23.5 26 25 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

A A A A 90 B A B A B A B A Dimensions are the ones for SV1300--.

Table of Contents

240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D sealing, with thread): DXT060-32-4A 17-4-32 3 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111

Table of Contents

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves.

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/A80H D-A73C/A80C D-F7/J79/J79W D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V D-F9BAL D-P5DWL D-A7/A80 Bore size (mm) A A B B A B A B A B A B A B 12 4.5 5.5 5 6 2 3 16 7.5 5 8 5.5 5 2.5 20 7.5 6.5 8 7 5 4 25 7.5 7 8 7.5 5 4.5 32 9.0 6 9.5 6.5 6.5 3.5 8 5 12 9 11 8 40 9 13 4.5 8.5 13.5 9 10.5 6 12 7.5 16 11.5 15 10.5 50 7 11 7.5 11.5 11.5 12

V100

1) (Station n) (Light/Surge voltage suppressor) + + + + + 48.5 [55.5] + + + + + 33.1 20 A A 20 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" A A 5 5 (Pitch) P=10.5 15.5 M5 x 0.8 (A port) (Pitch) P=10.5 15.5 Station n L1 L2 3 52 44 Station 20 230.5 222.5 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 Station 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5