High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CRQ2

10, 15, 20, 30, 40 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com K 20, 30, 40 CRA1 10, 15, 20, 30, 40 CRQ2 20, 30, 40 MSQ XA38 K 10, 15, 20, 30, 40 K J XA45 K K MRQ DCombination Chart of Made to Order 20Chart 4.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

B 81.7 75 (For DIN rail mounting) 8 7.9 164.7 148.2 35 A A A A A 98.2 5.5 12.2 58.9 A B A B 29.6 17.5 56.3 JIS-X-5101 MIL-C-24308 { } Manual override Press and turn for the locking type. ( ) 4(A) port side: Orange 2(B) port side: Green Equivalent to applicable D-sub connector 2 x M2.6 With option 2-4-40 UNC [4(A), 2(B) with inch size ports] L2 5 A 3/5 E 3/5 E 4 A A 4 A 4 (Rail mounting hole

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

CM2

CJ1 CJP CJ2 CM2 U1 A H MM NDH10 U1 NX1 Z R2 Y Bore size (mm) 20 25, 32 40 Applicable bore size (mm) 20 25, 32 40 NDH10 R1 A A1 NX E1 L1 MM Part no.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Standard Combinations

K 30 41 50 A 3 4 5 Applicable model ACG20 ACG30 ACG40 Part no.

5 Port Solenoid Valve

SPR3: Max. 1.0 A SPR2: Max. 2.0 A SPR4: Max. 1.0 A SPR5: Max. 2.0 A SPR7: Max. 1.0 A SPR6: Max. 2.0 A SPR8: Max. 1.0 A SDN1: Max. 2.0 A SDN3: Max. 1.0 A SDN2: Max. 2.0 A SDN4: Max. 1.0 A SMJ1: Max. 2.0 A SMJ3: Max. 1.0 A SMJ2: Max. 2.0 A SMJ4: Max. 1.0 A Supplied current IP67 IP40 IP67 14 to 122F (10 to 50C) 35 to 85%RH (No condensation) 500 VAC for 1 minute between terminals and housing

IIIIIII

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

Mechanical Valves Series NVM, NVFM, NVZNI

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

ISO Standard Hydraulic Cylinder

flats G Head side cushion valve F K MA C NA Air release M NB A SS B Rod side cushion valve TZ TX S + Stroke ZZ + Stroke H Rod side air release Stroke range Bore size (mm) E GB J M NA P PJ TD C F GA NB B S SS TX TZ H K D G MA A MM -0.016 -0.043 16 40 7.5 55 79 8 25 to 800 M6 x 1 M16 x 1.5 46 29 34 33 16 3/8 58 12 52 40 107 54 19 47 22 22 19 20 50 25 to 800 M8 x 1 9 M20 x 1.5 46.5 28.5 42

XM, XY

/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39

Rotary Actuator

CRQ2 +4 0 R o t a MSQ ti o 0 9 n y r a a w n y g e e k f of o MSZ k e e g y n R w a ot r a at n CRQ2X MSQX y o io 9 ti n 0 a ra t +4 0 n o g R e MRQ of k e y w a y 9 +4 0 0 Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

Electric Actuator

[mm] Stroke range (mm) C D EH EV H J K L M O1 R S T U Size 15 to 100 25 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 105 to 400 20 to 100 32 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 105 to 500 Without lock With lock Without lock Incremental encoder Absolute encoder With lock Stroke range (mm) B V Size A W 274.9 Z A W 233.4 Z A W 274.5 Z A W Z 238 15 to 100

EX120/121/122

19.2 k/ 45.45 k/93.75 k/ 187.5 k/500 k/ 1.5 M/3 M/6 M/ 12 Mbps 10 k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area

F

G A S K E T C O N S T R U C T I O N A g a s k e t m a d e o f s t a i n l e s s s h e e t c o v e r e d w i t h l a m i n a t e d N B R o n b o t h s i d e s i s s e a t e d o n t h e chamfer of a female thread to materialize a perfect sealing construction irrespective of the difference in thread diameters due to the difference in the types of female threads, variation in tolerance, difference

ITV

Input/output characteristics chart VEA Communication Specifications (CC, DE, PR, RC) VY1 ITV00-CC CC-Link Ver 1.10 ITV00-DE DeviceNet Volume1 (Edition3.8), Volume3 (Edition1.5) ITV00-PR PROFIBUS DP DP-V0 ITV00-RC RS-232C Model VBA VBAT Protocol Version Note 1) 156 k/625 k 2.5 M/5 M/10 M bps 125 k/250 k/500 k bps 9.6 k/19.2 k/45.45 k 93.75 k/187.5 k/500 k 1.5 M/3 M/6 M/12 M bps 9.6 kbps Communication

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water