Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

MXS Series Air Slide Table

3.5 deep 4 0.5 1 (With stroke adjuster at extension end) 12 32 24 18 9.5 F 10 3H9 2.5 deep +0.025 0 N -1 x F 2-M3 x 0.5 thread 5 deep 2 11 3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20

LX

(A contact) N.O. (A contact) Specifications N.O. (A contact) N.O.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Note 2) Use Series CY1B if the stroke exceeds 1500 mm with a tube inside diameter of 20 mm.

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

JXCx-OMU0004

P.50 i 7 LED i i i j j j 7 LED [6] g 2 LED a 7 LED f g j i 2 i j 3 LED a [2]7 LED f A LED b ) g i j 3 LED a h F15 g [] A 30 No.JXC-OMU0004-A 6 1) 2) 7 LED 3) 7 LED 7 LED 4) * 7.4 P.39 7 1 k n 16 10. P.50 6 * 8 e PLC PLC 9.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A J 3 30 17 M6 x 0.75 10 8 5 4 6 37 20 14 N S U F GN GS ZP3 Y 015 02 035 U B3 K 3 34 17 M8 x 0.75 11 10 7 6 6 40.5 20 14.5 13 B Dimensions Per Vacuum Inlet: One-touch Fitting 7 Model H J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

MY1

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Side Support Side support A MY-SA 2-G MX 2-H F E C D A B MTS MY Side support B MY-SB CY MG 2-J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DE C D A B -X 20(mm) E F G D A B C 15 25 35 45 H J M4 x

MXQ

Retraction End E1 D E H H F G B J C A K MXQ-BT20(L) MXQ-BT25(L) MXQ-BT8(L) MXQ-BT12(L) MXQ-BT16(L) (mm) Stroke adjustment range (mm) Applicable size A B C E1 G H J K 1) E D F Model MXQ8(L) MXQ-BT8(L) M8 x 1 M3 x 8 5 40.8 14 12.5 1.4 24.5 12 20 23 8 MXQ12(L) MXQ-BT12(L) M8 x 1 M4 x 10 6 40.8 16 16 1.4 29 12 18 28 10 MXQ16(L) MXQ-BT16(L) M10 x 1 M5 x 12 7 46.7 17 20 1.4 35.5 14 22 33.5 12 MXQ20

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

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SWltCh2~ Brown A laCK Blue SWitch 2 Switc"2 J'.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H Width across flats 12 Width across flats 3 F Width across flats 12 Width across flats 3 F E E D C D C 3 2 3 2 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke (mm) (mm) Q: 6 Q: 8 H I J Stroke A B C D E F H I J Model R S R S 20 +10 3 0 ZPR20F10-0-A14 20 22 12.5 15.5 29.3 46.5 58.5 126.5 30 +20 +7 50 ZPR25F10-0-A14 25

Air Slide Table

8 MXQR12 MXQR16 MXQR20 MXQR25 ( ) The MXQR6 series does not have a shock absorber type (J, JS, JT).

JIS Standard Hydraulic Cylinder

A K F GA F MA 2 x Rc P GA MA R CHN J CHM MM MM RR CHS TDe9 D E D E CH2 CH2 Width across flats G Width across flats G CHA C NA T M NA T TT Air release Air release B Related Products H + Stroke H S + Stroke TY 0.3 TY 0.3 TX ZZ + 2 strokes TZ D(mm) Bore size (mm) Stroke range (mm) B C SS GA M F J TX P NA R RR TZ T S TDe9 TT TY 32 39 2 158 113 20 28 58 20 25 to 800 M10 x 1.25 11 11 32 3/8 37

Air Cylinder NCA1 Series

R O D T H R E A D S T D. R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) G 11 13 15 19 N 15 17 20 25 UU 118 139 167 202 D (g6) 15 17 20 25 M 20 22 25 30 L 14 16 19 24 Model CVRA1BW50 CVRA1BW63 CVRA1BW80 CVRA1BW100 Single Shaft Type (mm) DD (h9) D (g6) Valve dimensions VH Keyway dimensions b l S U CA C Model W B BA J K H CB A F VJ 144 (177) 163 (201.5) 186 (230) M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 CVRA1BS50 13.5 8.5 46 17 48 17 36 5

NCA1

R O D T H R E A D S T D. R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

Air Slide Table Series MXQ

Retraction End E1 D E H H F G B C J A K MXQ-BT 8 (L) MXQ-BT12 (L) MXQ-BT16 (L) MXQ-BT20 (L) MXQ-BT25 (L) Stroke adjustment range (mm) Applicable size A B C E1 G H J K 1) E D F Model M8 x 1 MXQ 8 (L) M3 x 8 MXQ-BT 8 (L) 5 40.8 14 12.5 24.5 20 23 8 12 1.4 M8 x 1 MXQ12 (L) M4 x 10 6 40.8 16 16 29 18 28 10 12 1.4 MXQ-BT12 (L) MXQ16 (L) M10 x 1 M5 x 12 7 46.7 17 20 35.5 22 33.5 12 14 1.4 MXQ-BT16

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The maximum dimension L1 is, as a rule, twice the thread size. (Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4.

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise