SMC Corporation of America
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This is a legacy product. Please contact us for the latest version.sales@ocaire.com, THERMO CHILLER (AMAT/VSEA), HRS, CHILLER, 0.00000 lb

6) Note 4) CKQ D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) CKZ2N D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) WRF Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

PULSE F10 m or less PULSE R+ 17 PULSE R18 4 LA Encoder A-phase pulse (differential line driver) 36 PG0 LZ 9 8 5 LAR (Note 16) PG0 COM 10 LZR 9 3 6 LB Encoder B-phase pulse (differential line driver) LG 7 LBR (Note 11) SD Plate Control common 34 LG Control common 10 m or less (Note 8) 33 OP SD Encoder Z-phase pulse (open collector) Plate 10 m or less 2 m or less (Note 7) CN1 (Note 13) Main

[m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT16 LMPH 0h [pulse] PT17 LMNL Software limit 0h 10STM [m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT18 LMNH 0h [pulse] PT19 *LPPL Position range output address + 0h 10STM [m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT20 *LPPH 0h [pulse] 5 13 5.

) L1 = 50 [mm] L2 = 40 [mm] m L2 L1 Item Load factor an Note 1.

Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Mounting orientation and static moment Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Bore size (mm) A [mm] 6 m 19 21 25 27 33 40 49 Static load 10 15 20 25 32 40 m x g x (z + A) m x g x x m x g x y m x g x x m x g x y M1 M2 M3 moment Static m x g x (z + A) m x g x x m x g x y A: Distance between the center of the guide shaft and the upper surface

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

Extension stroke end adjuster Retraction stroke end adjuster Extension stroke end adjuster Retraction stroke end adjuster MXQ8A-m-X2192 30 40 15 23 5 10 12 8 3 13 16.6 18.2 M6 x 0.75 2.5 MXQA-CS8-X2202 MXQA-CT8 MXQA-DS8-X2202 MXQA-DT8 MXQ12A-m-X2192 35 45 17 26 6.5 10 14 10 4 16.2 18.9 20.7 M8 x 1 2.5 MXQA-CS12-X2202 MXQA-CT12 MXQA-DS12-X2202 MXQA-DT12 MXQ16A-m-X2192 40 50 18 27 8 10 15 12

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

SS5Y71, #1 + #10 M type plug connector .

As for I/O wires (max. length 10 m. However, 3 m for STO cable for CN8.) and encoder cables (max. length 10 m), use shielded wires and ground the shielded. Install an EMC filter and surge protector on the primary side. The following shows recommended products. EMC filter: Soshin Electric HF3000A-UN series Surge protector: Okaya Electric Industries RSPD series Line noise filter.

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

At power-on, "888" appears instantaneously, but it is not an error. 10 13 10. TROUBLESHOOTING 10.4.3 Remedies for warnings CAUTION If an absolute position counter warning (AE3) occurred, always make home position setting again. Not doing so may cause unexpected operation.

from QD75[pulse/rev] 4000 20 6000 30 AP 1 1 1 1 Minimum command unit 1pulse AL 1 1 1 1 AD75P AM 1 1 1 1 Electronic gear AP 4000 20 6000 30 Minimum command unit 0.1 m AL 1000.0[ m] 1000.0[ m] 1000.0[ m] 1000.0[ m] AM 10 10 10 10 Note.

H 3.3 L Caution 40 10 H Do not operate with the stroke adjusting unit fixed in an intermediate position.

M1 3A = M1E/M1E max = 2.25/10 = 0.225 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max at 420 mm/s in Graph (3).

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load