SMC

Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA

HRX-OM-W058

. 9-7 9.5 Heating capacity . 9-8 9.5.1 HRS018-A-20-R, HRS030-A-20-R . 9-8 9.6 Pump capacity. 9-9 9.6.1 HRS018-A-20-R, HRS030-A-20-R . 9-9 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R . 9-9 9.7 Compliance . 9-10 9.8 Sample DoC. . 9-11 9.9 Daily Check Sheet . 9-12 Chapter 10 Product Warranty . 10-1 HRS-R Series HRX-OM-W058 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before using

Compact Cylinder

Reduction rate B(MU) B(CQU) Reduction rate 40% Reduction rate A(CQU) C(CQU) A(CQ2) C(MU) A Dimension Comparison B/C Dimensions Comparison Mass Comparison (g) (mm) (mm) A CQ2 B MU C MU Mass MU Size Size Size Reduction rate Reduction rate Reduction rate Reduction rate CQU CQU CQU CQU 252 376 552 54 68 86 85 88 90 20 25 32 40 20 25 32 40 20 25 32 40 39% 40% 38% 38% 22 24 28 32 47 53 62

SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

JXCx-OMX0009

Brown 2 A B-1 A A-1 Red 1 Cable lehgth (L) Orange 6 B B-2 8 8m B A-2 Yellow 5 Green 3 COM-A/COM B-3 A 10m COM-B/ A-3 Blue 4 B 15m Shield (3) Cable color Terminal No. C 20m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 produced upon recipt of A A-5 Black 6 order B B-6 Orange 9 B A-6 Black 8 Only Robotic type cable 3 can be selected.

SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

IZx-OMR0035

A magnetic type origin detection sensor is used for controlling the automatic cleaning. Keep magnetic field more than 50 mT away from the ionizer enclosure. If a magnetic field more than 50 mT approaches the ionizer enclosure, the ionizer may malfunction.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Brown 2 A B-1 A A-1 Red 1 Cable lehgth (L) Orange 6 B B-2 8 8m B A-2 Yellow 5 Green 3 COM-A/COM B-3 A 10m COM-B/ A-3 Blue 4 B 15m Shield (3) Cable color Terminal No. C 20m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 produced upon recipt of A A-5 Black 6 order B B-6 Orange 9 B A-6 Black 8 Only Robotic type cable 3 can be selected.

A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?

This is a legacy product.

This is a legacy product.

A large digital display provides a clear view of the current and set values.

Battery-less

35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE Lead A B C A B C A B C A B C Ambient

Integrated Controller

Lead 20: EQY25H 100 Min. 25% Max. 50% 10 20 30 40 50 90 70 80 60 0 Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 40C or less 50 or less 100 Pushing force 45% 50% 70% 42 Battery-less Absolute (Step Motor 24 VDC) Easy to

LJ1H

400 L3 (mm) a = 2000 LEC-MR-RB-12 LEC-MR-RB-12 LEC-MR-RB-12 LEC-MR-RB-12 A1 A2 B1 B2 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 45 for deflection data.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

B A A A B B B B A A A A SY 3 L1 L2 SV 2 11 11 71.5 (Pitch) P = 51 (Pitch) P = 51 71.5 6 [2] 1 SYJ 2n x 1/2, 3/4 (A, B port) Stations SZ 24 [23] 70 [71 .5] 58 28 105.5 176.5 209 9 9 20 2n x 1/2 VP4 D side Plug assembly: VVFS2000-30A(Option: Refer to page 1326.)

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Please consult SMC when considering the necessity of the regeneration option. 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) L2 (mm) L3 (mm) Pitching Rolling Yawing 100 m a=1000 a=2000 a=3000 L1 0 30 20 10 Transfer load m (kg) Maximum load L2 200 a=3000 Regeneration option model Driver type Mer a=2000 A1 A2 B1 B2 a=1000 Not required. Not required.

LG1H

Not required. 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a=1000 Half load 4000 a=2000 L3 (mm) Regeneration option model Driver type L3 a=3000 2000 A1 A2 B1 B2 Not required. Not required. Not required.