A A A A 10 2 x 4.5 (For mounting) (Station 1) (Station n) L2 4 (Light/surge voltage suppressor) L1 (Station n) (Station 1) + + (Light/surge voltage suppressor) 48.5 [55.5] A A 20 + + 15 B B 5 33.1 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1.5 (Pitch) P = 10.5 A A 20 15 5 11.8 B B 1.5 (Pitch) P = 10.5 M5 x 0.8 (A, B port) 11.8 L plug connector (L) M plug connector (M)
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
A 5 (2) (FR-BIF-(H) ) (UVW) (UVW)(UVW) U U U U V V M V M V W W W W DC (EMG) DC24V DC24V DOCOM DOCOM DICOM DICOM RA RA A 6 (3) (4) () (5) (EMG) ON( RYn 0 ) O FF (ALM ) ( E MG ) (EMG) ON(Ryn0)OFF(ALM) (MBR ) EM G RA DC24V A 7 (6) 10 (7) () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , A 8 20041, (FR-BAL FR-BEL-(H)(())) EEP-ROM EEP-ROM1010 EEP-ROM EEP-ROM EEP-ROM EEP-ROM EC 1EC
AF Construction AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT IN IR VEX AMR ITV SMC K P C IC U O S L H t e VBA A-A A w y VE VY1 r G i PPA AL !0 !1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No.
AF Construction AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT IN IR VEX AMR ITV SMC K P C IC U O S L H t e VBA A-A A w y VE VY1 r G i PPA AL !0 !1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No.
N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.
0 u t l3 N/A 0.44 2.8r .43 .56 N/A .44 .50 (tn)0H[.35(B) 3.96 4.36 7r6.18 uNt t6 N/A 0.44 3.44 .44 .57 .02 .50 .50 ([Rt0r .5(B) 3.88 4.35 y+I6 u{r . i 9 N/A 0.50 3.31 .oJ .67 N/A .68 .50 .R)otMt.0(8) 5.12 5.62 I-I2 UNF .25 N/A 0.61 4.09 .87 .55 . 1 8 .88 .50 (tR)0tlll.l5rl 5.92 6.12 r 74,12 U F .38 l . t 3 1.20 3.81 t.l0 .55 .21 l . l ?
suppressor) D F Q D F Q 300 300 C R E Y C R E Y 1.5 1.5 B1 B B1 A A B 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole DIN terminal Conduit terminal D G1/2 S Q F Cable 6 to 12 34 D Q2 F (44) 31.5 32 25 R T E C R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting
DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.
5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !
56.6 73.2 BUS IN 8.7 PWR PWR 4.7 (9.5) (Fitting for the type with P/E ports on U and/or D sides) 48.2 18 (Pitch) P = 16 (20.5) [External pilot] 18 31.8 4.7 (20) 50.5 39.7 15 3/5 E 3/5 E B 2 B 2 B 2 B 2 B 2 PE B A 3/5 14 A B A 14 A P 1 A 4 P 1 A 4 A 4 A 4 A 4 1 X E Cut dimensions for panel mounting Refer to panel cut dimensions for details. (59.8) P (31.7) 12 B 12 One-touch fitting [1(P),
D 20 26.7 35.5 35.5 E 30 38.4 38.4 G J 20 26.7 35.5 35.5 M N 27 40 54 54 Q 22 23 26 25 R 5.4 6.5 8.5 8.5 S 8.4 8 10.5 10.5 T 40 53 70 70 U 2.3 2.3 2.3 2.3 V 28 30 35 34 B 104.9 156.8 186.9 188.9 A 40 53 70 75 40 50 75 75 30 41 50 50 AFM20-A/AFD20-A AFM30-A/AFD30-A AFM40-A/AFD40-A AFM40-06-A/AFD40-06-A Model Semi-standard specifications With barb fitting With drain guide B 123.6 155.6 157.6
Contents 16 20 to 100 Contents Kit no. Nickel plated Nickel plated !3 Hexagon socket head taper plug Slide Bearing Felt Holder Ball bushing 16 20 25 32 40 50 63 80 100 MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS Set of nos. above @3, @4, @5 @6, @7, @8 Set of nos. above @3, @4, @5 @6, @7, @8 !4 !5 !6 !
x P U 36: T-slot pitch 20 5 N C (5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 L-M6 4H9 C Work piece mounting reference plane Refer to Cross section C-C.
S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).
20 15 5 A A B B 20 1 5 15 (Pitch) P = 10.5 M5 x 0.8 (A, B port) A A 17.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 18 1.5 SS5YJ3-32, S32Stations -M5 Station n L1 L2 Station 2 41.5 33.5 Station 20 230.5 222.5 3 52 44 4 62.5 54.5 5 73 65 6 83.5 75.5 7 94 86 8 104.5 96.5 9 115 107 10 125.5 117.5 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178
9 @0 @1 @2 @3 q w e r t y u i o !0 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.
(2 to 10 stations) 20 stations Nil L B D U B M Straight Elbow type (upward) U side (2 to 10 stations) Elbow type (downward) Both sides (2 to 20 stations) Special specifications In the case of special specifications, indicate separately on a manifold specification sheet.
If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover. 75 + 55 (n 2) 20 + 50 ( n 2) (n = 2, 4, 6) 20 75 2 D-B59W 15 Caution Weight (kg) 1.