NCG/CG1

Bore size 40 mm (1-1/2) 50 mm (2) 63 mm (2-1/2) Stroke Hundredths of an inch* 20 25 32 40 50 63 20 mm (3/4) 25 mm (1) 32 mm (1-1/4) Stroke length must be indicated as 4 digits.

VDW

4 11 34 15.5 30.5 33 16.5 19.5 20 4, 6 14 17 35 Port size M5/M6 Grommet Y W 2 x 3.4 Mounting hole U X U1 X1 D Q F 300 Full wave rectifier (AC type) R E C (mm) Model Port size P B B1 E C D F 20 VDW1 VDW2 M5(M6) 20 10 46 15 9.5 11 2 x P Port size B1 M5(M6) 22 11 51 9.5 13.5 B Mounting bracket dimensions Electrical entry Model Port size P Grommet U U1 X1 Y W X Q R 39 VDW1 VDW2 28 14 17 17 M5

Electric Grippers

0 20 10 30 40 50 60 Pushing force and trigger level range 120 70% 80 Specific Product Precautions 40% 40 0 0 20 40 60 80 100 120 140 Gripping point L [mm] Pushing speed [mm/sec] 42 Electric Gripper 3-Finger Type Step Motor (Servo/24 VDC) LEHS10, 20, 32, 40 Series LEHS RoHS How to Order 10 3 K 4 1 S 1 LEHS 6N q w e r t y u i o !

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !

Modular F.R.L. Unit

117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

Thermo-chiller

Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

CL

25 26 27 26 30 31 29.5 38 49 61 64 54 59 67 72 76 10 13 18 23 25 32 40 40 52 52 10 12 15 17 19 10 10 10 14 14 85 95 102 113 124 27 32 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

5 u Parts list No. Description No.

Rotary Table/

of angle adjustment screw an ro en Size ta t r ti n r o n an e n d tio ge 95 ta 10.2 10 20 30 50 70 100 200 ro m mu 7.2 xi Ma 6.5 8.2 7.0 Note) The drawing shows the rotation range of the positioning pin hole.

MG

5 u !4 !6 @5 @3 !9 w @7 !0 y !2 @5 !1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(2 to 10 stations) 20 stations Nil L B D U B M Straight Elbow type (upward) U side (2 to 10 stations) Elbow type (downward) Both sides (2 to 20 stations) Special specifications In the case of special specifications, indicate separately on a manifold specification sheet.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

2/3 Port Valve

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

Compact Rotary Actuator Series CRQ2

2 u t e o @3 @1 @4 @0 @6 @0 CRA1 CRQ2 q w r y !5 i MSQ q w r y !5 !6 i MSZ CRQ2X MSQX MRQ With cushion Size 20/30/40 With auto switch and cushion Size 20/30/40 !3 !0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

LG1H

It may cause a fire. ply (100V/200V) is added to the driver,s servo motor power (U, V, W). Be sure to check wiring such as wiring mistakes when the power supply is turned on. 5. Do not conduct an insulation resistance test and withstand voltage test on this product. 2. Connect the ends of the U, V, W wires from the motor 6.

7ND9071en

The display starts to blink next position (50 % or 20 %).

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Electric Actuator

For auto switches, refer to pages 19, 20.

SZ3000

SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 02 2 stations SUP/EXH block mounting position SUP/EXH block fitting specifications 20 D side (2 to 10 stations) 20 stations D U B M Nil L B Straight Elbow type (Upward) U side (2 to 10 stations) Elbow type (Downward