SMC Corporation of America
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194 221 17 14 U to 800 42 30 269 264 23 246 287 26 22 CX L RR to 800 42 30 269 264 23 246 287 26 22 Z + Stroke ZZ + Stroke Double clevis(D)/Locking at head end (-H) -W -H/ -R (mm) Port Cushion valve Stroke range Bore size (mm) +0.3 +0.1 CDH10 ZZ ZZ L CX Z RR CZ U Z CDH10 32 40 50 63 80 100 to 500 23 14 172.5 180.5 170 10.5 28 13 162 10 to 500 23 14 182 195 184 11 28 13 171 10 to 600 30 20

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

Grease pack part no.: GR-S-010 (10 g) 552 Series CXSJ Dual Rod Cylinder Compact Type Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r u y i o Component Parts: Axial Piping Material No.

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

, E Tubing of equal O.D. diameter 99 o3 07 09 1 1 1 3 06 08 1 0 1 2 1 6 ;il H,r ,u x,N 1 2 m m Double universal male elbow 10 32 UNF Thread 1/16" NPT 1/8' NPT l+ trtpr H L' w' T' Y U' E Hex. socket head universalelbow 33 34 Extended Different dia. branch "Y" Double branch "Y" M5 M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a

Description Model AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B Round G27-10-R1 G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 Pressure gauge Note 1) Square Note 2) embedded type 1.0MPa GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Attachments Accessories G27-10-R1 Note 3) G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46

External pilot solenoid SGH 1 Y A G 1 T Z B1 10 0 30 3 SGHA 1 A G B1 10 0 3 30 Air operated q w e r t y u i o !0 !1 !

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.

100 6-5-52 53 Series CG1Q Air Cylinder: Low Friction Type Double Acting, Single Rod With Mounting Bracket Without rod boot ZZ Axial Foot Style Axial foot style: CG1LQ Without rod boot Z Bore (mm) B LC LD LH LS LT LX LZ M W X Y 20 25 32 40 50 63 80 100 34 4 4 4 4 5 5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

7 w e r !8 @1 @6 @5 Lead wire colors for circular connector cable assembly terminal numbers Cable 0.3 mm2 x 25 cores O.D. 1.4 !9 y t @0 u Lead wire colors for circular connector cable assembly (AXT100-MC26) 015 030 050 Approx. 10 Terminal no.

-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG

-9 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7

Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !

w w AW10 y y y q q q IN OUT IN OUT IN OUT u u r u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

15 18 25 31.5 35.5 15 17 17 21 21 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 x 1.75 44 52 64 78 92 26 27 26 30 31 10 12 16 20 25 54 59 67 72 76 27 32 32 37 37 16 20 20 25 30 10 13 18 23 25 30 35 35 40 40 32 40 40 52 52 10 12 15 17 19 60 70 86 102 116 10 10 10 14 14 96 108 115 129 140 85 95 102 113 124 Bore (mm) W/o rod boot W/ rod boot KA N P PH U K PG PW L PL LZ RR S MM

Material Description Description q w e r t y u i o !0 !