KA

(mm) A D2 L1 D1 M L2 Part No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Dual Speed Controller with One-touch Fitting Series ASD 1

D1 T T Metric Size L4 L5 A1 A2 M Max.

ASD

D1 A2 T T Inch L4 L5 A1 A2 M MAX.

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

Cooling Capacity: CH1: 19 kW; CH2: 1 kW, Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: -

Cooling Capacity: 200 (CH1: 19 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control)

Cooling Capacity: 300 (CH1: 26 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control)

Accs Set for CH1 (F Opt) HRL100/200/300, HRS090 AND LARGER CAPACITIES, O88, 5.5 lb

Motor Breaker for HRL100/200/300-A*-40, HRS090 AND LARGER CAPACITIES, O88, 260 lb

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

A2 T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Digital Pressure Sensor

P.SET: Trimmer for pressure setting Vcc Brown ( ) D1 UNIT Black (O) D3 Tr Main computer Load LCD D2 Blue ( ) PLC Sequence Controller Wiring COM terminal MINUS in this case Environment Warning Brown ( ) D1 Vcc qThe sensor case is not water-proof; Do not immerse it in any liquid, or spil any liquid on the case. wGround the piping when induction noise is expected to be generated from piping.

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.

Cooling Capacity: CH1: 9 kW; CH2: 1 kW, Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (60 Hz)], DI Option: -, Pump Option: -

Cooling Capacity: CH1: 9 kW; CH2: 1 kW, Pipe Thread: F [G (Rc-G Thread Adapter Set is Included)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (60 Hz)], DI Option: -, Pump Option: -

Cooling Capacity: 100 (CH1: 9 kW; CH2: 1 kW), Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (60 Hz)]