SMC Corporation of America
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Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

2-4.5 Mounting holes 4 32 19.2 Manual override Cover dia 1.6 Cross section 0.34mm2 R4 4 A 2 34 SY 15 SMC 3 R 1 P SYJ 40 300 70 VK (Lead wire) VZ VT VT 51 45 VP A port 22 13.5 16 9 9 VG M5 X 0.8 External pilot port (Only external pilot style (R)) 17 10.5 PE port (Rc(PT)1/8) (Rc(PT)1/8) VP 3-Rc(PT)1/8,1/4 10 (Rc(PT)1/4) 18 P/A/R port (Rc(PT)1/4) VQ DIN terminal (Y): VQZ2l5(R)-lYl01 02 01 02

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

No.JXC-OMT0061CN CC-Link (DC24V) / LECPMJ 1 . 4 2. . 6 2.1 . 6 2.2 . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8(). 11 9 . 11 3. . 12 3.1 . 12 3.2 . 13 3.3 . 14 (1) (LECPMJ-) . 14 (2) DIN (LECPMJD-) . 14 3.4 . 15 (1) . 15 (2) . 15 (3) . 16 4. . 17 4.1 (STATION NO.B RATE) . 17 4.2 . 18 4.3 PLC . 18 5. . 19 5.1 CN1: . 19 5.2 CN2CN3: . 19 5.3

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

Applicable model Min. operating flow rate [L/min] HRL-BP002 HRLE050-m-m CH1: 15/15 (50/60 Hz) CH2: 1/1 (50/60 Hz) HRL-BP001 HRLE090-m-m CH1: 25/35 (50/60 Hz) CH2: 1/1 (50/60 Hz) CH1 Circulating fluid return port Applicable hose I.D.: 19: HRL-BP001 Applicable hose I.D.: 15: HRL-BP002 u q r t i !0 CH2 Circulating fluid return port Applicable hose I.D.: 15 o u !

A B 4 (5/32") C4 10.1 8.1 6 C6 10.3 8.3 8 (5/16") C8 12 10 1/4 N7 10.3 8.3 PFM -01/02--X693 PFM -01/02--X694 7 5 7 5 10.2 10.2 43 1 1 IN OUT A 43 (34.2) (34.2) 13 3 13 3 A 18 C 18 B C OUT B 48 20 IN 20 48 2 x 3.4 2 x 3.4 C (Width across flats) A B Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 17 17 15 G 1/4 21 940 Series PFM7/PFM5 Made to Order 2 Please contact SMC for detailed specifications

9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

AS2301F-02, AS2311F-02 AS2201F-02, AS2211F-02 AS3201F, AS3211F AS4301F, AS4311F AS4201F, AS4211F AS3301F, AS3311F Supply pressure: 0.5MPa Supply pressure: 0.5MPa Supply pressure: 0.5MPa 16 25 6 400 1000 14 10, 12 1500 12 80, 10 20 12 Effective area (mm2) Effective area (mm2) 08 06 Effective area (mm2) 300 10 Flow (l/min(ANR)) Flow (l/min(ANR)) Flow (l/min(ANR)) 06 10 1000 4 15 500 8 04 200

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32UNF) R NPT N Needle Valve/Flow Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-14-2 3 Check Valve with One-touch Fitting Series AKH/AKB 3 configurations provide design solutions based on the operating conditions.