HRX-OM-R016

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

HRX-OM-W038

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS2200-01 AS1200-M5 Made to Order Refer to page 647 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

HRX-OM-R005

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

HRX-OM-O021

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Direct Solenoid

on NVS 3125) 48 VDC Poitlng 01 = 1/8" NPTF (NVS 3125 only) Cv 069 02 = 1/4' NPTF (NVS 3125 only) Cv 0.8i!

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"