Display Pressure: 0.2MPa, Connection Thread: R 1/8, M5 Female, Grade: General Degreasing, Production Line, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Grade: General Degreasing, Production Line, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 10 (1.0MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 7 (0.7MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 10 (1.0MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

MXW Series Long Stroke Slide Table

Torque Recommended torque in lbf (N m) Hexagonal wrench width across flats Type Fixing thread size 1.5 5.3 (0.6) MXW 8 M3 x 4 1.5 5.3 (0.6) MXW12 M3 x 4 1.5 MXW16 M3 x 4 5.3 (0.6) 2 MXW20 M4 x 5 7.1 (0.8) 2.5 MXW25 M5 x 6 8.9 (1) 139 MXW Series Long Stroke Slide Table Operation Guide Maximum dynamic load and allowable moments are different depending on work mounting orientation,cylinder

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Applicable bore size C1 d H1 C2 d H2 B1 B2 4 SNJ-010B 6 11 12.7 M8 x 1.0 4 3.2 NTJ-006A 6 5.5 6.4 M3 x 0.5 2.4 SNJ-016C SNKJ-016C 10 16 NTJ-010C NTJ-015C 10 16 14 17 16.2 19.6 M10 x 1.0 M12 x 1.0 7 8 8.1 9.2 M4 x 0.7 M5 x 0.8 4 4 The applicable mounting nuts are different from those for standard cylinders. 694 CJ2W-Z Series 10-/1121-/2210, 16 Double Rod Cylinder RoHS How to Order Clean series

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Applicable bore size SNJ-016C SNKJ-016C 10 16 C1 d C2 d B1 B2 H1 H2 14 17 16.2 19.6 4 4 7 8 8.1 9.2 3.2 4 M10 x 1.0 M12 x 1.0 M4 x 0.7 M5 x 0.8 The applicable mounting nuts are different from those for standard cylinders. 7 B CJ2W-Z Series 10-/1121-/22Double Rod Cylinder 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

I

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

3M/SMseries

size Cv factor Weioht(3) lbs(kst) %NPTF %NPTF %NPTF 0.8 1.0 0.46(0.21) NVF3l3G.OO-017 2/Single NVF3230-OO-orT 2yDouble 0.8 1.0 .291 NVF3330-OO-0tT 3lolosed centel u,oJ 0.8 o.97(O.44 NVF3430-OO-0tT 3/Exhaust center 0.8 '1 .0 0.97(0.44) Body ported (May be mounted on 30 type manitold) % ' V . t NPTF NVF3530-OO-0173/Pressure center 0.8 0.55(4) 0.9 0.6(4) 0.97(0.,14) Nole (1) lf exhaust lor main

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

Table of Contents

Refer to page 14-20-4 for flow rate and page 14-20-4 for the max. flow line graph.

Clean Air Module

Note 2) Refer to the specifications of display unit for the flow rate value per pulse. 340 Clean Air Module LLB Series Dimensions LLB3-1-PRVSF V2 49.5 HAA HAW Mounting hole for 4 x M4 AT 45 37 35 IDF IDU 1.5 4 20.5 278.5 50 IDF FS A Valve open and locked position Rc 1/4 (NPT 1/4) Rc 1/4 (NPT 1/4) IDFA 90 (Lever operating direction) Max. 91 IDFB A Hand valve Valve closed position 5.5 39 IDH



8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 M5 M5 AMR 1 4 2 1 (5) (5) Weight (kg) 0.15 0.18 0.2 0.3 0.5 1.4 2 4 ITV Note 1) No condensation.

Power Valve: Economy Valve Series VEX5

2449. 1/4 (P2) Port size Refer to page 2449.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.