1

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F.O.F.* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

CATALOG

10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Table of Contents

02 01 02 01 02 01 02 01 02 Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 6 to 8 Applicable cable O.D. 2.3 to 2.8 Light/Surge voltage suppressor (At EZ) Light Light Max. 10 Max. 10 Other dimensions are the same as the grommet type.

V100

Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.

Vacuum Pad

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

Vacuum Pad

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

Vacuum Pad

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

Vacuum Pad

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

4/5 Port Solenoid Valve

fitting (A, B port) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (4.9) 36 (3.6) L plug connector (L) 10-SYJ7123-L-01 (-F) M plug connector (M) 10-SYJ7123-M-01 (-F) M8 connector (WO): 10-SYJ7123-WO-01 (-F) DIN Terminal (D): 10-SYJ7123-D-01 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65 31.5[38.5] 101 MAX.10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6[49.6

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Table of Contents

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

auto-drain Control equipment Symbol Nil A AP M MP F G C E VQ7 Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Connector mounting direction Stations Symbol Applicable base With connector 02 2 stations D Nil D side mounting None 01, 01T, 10 15 15 stations U 01C, 01F U side mounting Base type 01, 01T, 10 2 to 15 stations 01C, 01F

Table of Contents

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

SY

1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89

VFS

type 01C 01F 10 Control equipment Symbol Nil A AP M MP F G C E Air filter with auto-drain Connector mounting direction Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Symbol Applicable base With connector Stations D side mounting None D Nil 01, 01T, 10 02 2 stations U 01C, 01F U side mounting 15 15 stations Junction cover