Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Air Slide Table/Long Stroke Type Series MXY

21.5 4 2 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 30 70 10 40 29 M4 x 0.7 25 20.9 3.5 25 4 14 5 2.5 MXY12 40 M5 x 0.8 8.5 86 15 52 31 18 36 30.9 32 5 6 3 PH R RH RL T TB P PL PR Q QW TH W WD WE WR Z Model MXY6 4 2.9 5.1 13 7 9 11 60 12 3(depth 3) 3(depth 3) 2.5 30 5 88 25.5 20 MXY8 4 3.4 6.1 19 7 10 13 70 15 3(depth 3) 3(depth 3) 3 38 6.5 98 32 25 MXY12 5 4.5 7.8

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

CEP1

MODE , () , 2 (90) , , ,, 2 , , SMC() 7,8 10 (, , ) CEU5 , , 10 , ( ,23m ) 23m , AC ? , 8 ? , , 50~300mm/s , 7 ? , , 9 6-2 ? 3,4,9 ? , , 3 ? , ,, 3,9 ? 50~300mm/s 7 ,? , 3,9 ? , 3,9 , ? , , 4 ? , 2,3

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

mm/s Symbol Rubber bumper Allowable kinetic energy 10 0.035 J 16 0.090 J Minimum Operating Pressure Unit: MPa Bore size (mm) 10 16 Minimum operating pressure 0.03 Standard Strokes Made to Order (For details, refer to pages 1069 to 1262.)

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

CE

70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?

MONOSASHI-KUN

Cylinder Specifications 10 3-2. Sensor Specifications 10 3-3. Allowable Kinetic Energy 11 3-3-1. Allowable Kinetic Energy 11 3-3-2. Mass of Cylinder Movable Parts11 3-3-3. Load mass and Piston Speed 11 4. Wiring 4-1. Connector Wiring Table 12 4-2. Wiring for Counter 12 4-3. Noise countermeasures 12 5. Structure and Measuring Principle 5-1. Structure 13 5-2.

CEx-OMB0075

A-phase pulse B-phase pulse 11 12 11 10 10 Count multiplier In rod extending direction, A-phase turns on first, then B-phase turns on with the delay of In rod retracting direction, B-phase turns on first, then A-phase turns on with the delay of approximately 90 phase difference. approximately 90 phase difference. Counter performs addition in and does subtraction in .

Cylinder with Turntable ø63, ø80, ø100 Series MGT

A96 A93 A90 5 V Yes IC circuit Individual -X Grommet No 2-wire 100 V Relay, PLC 24V 12 V IC circuit 100 V or less Solid state auto switches marked are produced upon receipt of order.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 10 st 10 st 10 st 5 st 5 st 5st 5 st 5 st M4 x 0.7 6 6 9 10 12 5 60.5 27 54.5 13.5 24 50.5 22 44.5 8.5 19 4 7 14 5 10 M4 x 0.7 14 5 53 63 23.5 28.5 47 57 8.5 13.5 20.5 25.5 4 10 15 6.5 12 M6 x 1.0 20 8 61 71 24.5 29.5 52 62 9.5 14.5 23.5 28.5 5 12 18 8 16 M6 x 1.0 24 10 67.5 77.5 27.5 32.5 57.5 67.5 10 15 27.5 32.5 5 14 20 10 20 Double clevis bracket material: Carbon steel For details

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5st 5 st 5 st 10 st 10 st 10 st 10 st 10 st M4 x 0.7 6 6 9 10 12 5 50.5 22 44.5 4 7 14 5 10 8.5 19 60.5 27 54.5 13.5 24 M4 x 0.7 14 5 53 23.5 47 4 10 15 6.5 12 8.5 20.5 63 28.5 57 13.5 25.5 M6 x 1.0 20 8 61 24.5 52 5 12 18 8 16 9.5 23.5 71 29.5 62 14.5 28.5 M6 x 1.0 24 10 67.5 27.5 57.5 5 14 20 10 20 10 27.5 77.5 32.5 67.5 15 32.5 Double clevis bracket material: Carbon steel For details

Table of Contents

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Parallel Style Air Gripper Series MHZ

14 4 4 6 10 14 4 4 6 10 14 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 Double acting Single acting type, Normally closed Normally closed Normally open MHZ MHF Single acting 3.7 12 31 56 83 MHL Refer to pages 436 to 440 for the specifications with auto switch.

NCG/CG1

Auto switch model Bore size (mm) Operating Range 100 20 25 32 40 50 63 80 D-C7/C80 D-C73C/C80C D-B5/B64 11 10 10 9 10 8 11 17 10 14 10 14 9 14 10 13 8 13 11 16 11 18 D-B59W D-M9, M9W D-M9A 6.5 6 5 4.5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 10 mm 10 mm 10 mm 10 mm Model With shims 10 to 13 mm 10 to 13 mm 10 to 13 mm 10 to 13 mm CKQG CLKQG CKQP CLKQP Workpieces to be clamped should not be thicker than those shown in the table. 5. Clamp only the flat side of a workpiece. 6.

SMC Pneumatic Clean Series

6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18 22 26 90 90 108 108 20 20 25

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.