HEC-OM-S008

omit) 4-3 HECR Details of Communication Format Host SOH UT ENQ 34H Check sum CR (H) (L) Thermo-con SOH UT STX 34H Data ETX Check sum CR D1 D2 D3 (H) (L) Host ACK UT CR (Possible to omit) Data (D2, D2, D3) changes following bit line to ASCII code. (1 is for ON, 0 is for OFF) D1 23 22 21 20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure

A_HEC-OM-K001

SOH UT STX 34H Data ETX Check sum CR D1 D2 D3 () () Host ACK UT CR (Possible to omit) 7.4 Details of Communication Format 7-9 A_HEC-OM-K001-1.7 Chapter 7 Communication Data (D2, D2, D3) changes following bit line to ASCII code. (1 is for ON, 0 is for OFF) D1 23 22 21 2 0 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Fan alarm ERR21 Output failure alarm ERR15 D2 23 22 21 2

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

D2 L1 L2 L3 M1 L4 H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

A2 T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Inch Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

KS/KX

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

Digital Pressure Sensor

P.SET: Trimmer for pressure setting Vcc Brown ( ) D1 UNIT Black (O) D3 Tr Main computer Load LCD D2 Blue ( ) PLC Sequence Controller Wiring COM terminal MINUS in this case Environment Warning Brown ( ) D1 Vcc qThe sensor case is not water-proof; Do not immerse it in any liquid, or spil any liquid on the case. wGround the piping when induction noise is expected to be generated from piping.

Series GS40 Digital Pressure Sensor 1

D1 Protection diode D2 Surge supressor (Surge absorbing diode) D3 Surge supressor (Surge absorbing diode) Tr Output transistor Example of wiring Relay, example of wiring for resistant load, etc q SET: Push button w ALM: Alarm LED (Red) SMC DIGITAL PRESSURE SENSOR Vcc D1 Brown (+) ALM.

Vacuum System Peripherals:

H Nil Individual Specifications (Symbol , ) Combination of supply valve and release valve Symbol K1 K3 K6 K8 J1 J2 Nil K2 K4 K5 K7 J3 J4 D1 D2 D3 D4 Supply valve N.C. (VJ114) N.O. (VJ324) Air operated (ZX1A) Air operated N.O. (VJA324) N.C. (VJ114) N.O. (VJ324) Without valve module N.C. (VJ114) N.O. (VJ324) Air operated (ZX1A) Air operated N.O.

VQ5000

D2 D3 D0 D1 D2 12 12 stations F 1 to 12 Manifold is 12 stations max.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Inch Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

KC

Note) D1: Max. diameter Union Tee: KCT Effective area (mm2) Nylon Urethane 2.8 2.8 7.6 7.6 13.7 11.1 21.1 19.0 28.3 24.3 Applicable tubing O.D.

Power Clamp Cylinder ø 40, ø 50, ø 63, ø 80 Series CKZT

6 6 6 6 8 8 8 8 D2 7 9 9 9 10.2 10.2 10.2 10.2 H 16 20 20 25 20 20 20 25 40 50 63 80 40 50 63 80 S Bore size 40 40 50 63 80 50 63 80 B For 40 of A015, S type only Offset Arm position A015 A045 Offset 15 Offset 45 D1 Right D2 H R Center D1 D2 C H Left D1 D2 L H 192

KB

Removal is complete. 15-2-112 Piping Module Series KB Air Output Port 1 Elbow Module: KBV Applicable tubing O.D. 4 Weight (g) D1 D2 D3 L1 L2 A M L3 L4 Model KBV1-04 KBV1-06 KBV2-06 KBV2-08 KBV3-08 KBV3-10 KBV3-12 KBV4-12 KBV4-16 16.8 22.0 24.0 25.0 28.5 29.5 31.5 34.0 35.0 39.0 4.3 4.9 7.3 8.3 15.0 17.5 19.3 20.2 36.4 10.4 13.6 16.0 19.5 33.0 10.4 13.0 6 12.8 17.0 17.6 22.5 36.0 10.1 15.5

KS/KX

A flexible polyurethane tube is recommended when the lateral load is applied. 15-2-39 Series KS/KX Male connector: KSH (Standard) H (width across flats) Applicable Connection thread R Min. port size Effective area (mm2) Nylon Urethane Weight (g) Model M D2 L A D1 tubing O.D.

Plug-in/Plug Lead: Single Unit

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Profile Design ISO/VDMA Air Cylinder Series CP95

30 5 8 4 17 15 51 233 320 114 89 32 5 1.8-9 Series CP95 Dimensions mounting accessories L, F, C and D [mm] Mounting type L STROKE STROKE Mounting type F Rear mounting STROKE Front mounting Mounting type C Mounting type D STROKE Bore 1.8-10 ISO/VDMA Air Cylinders Series CP95 Dimensions mounting accessories C, D, E and CR [mm] Mounting type C Mounting type D Bore E1 EW TG1FL l1 L I2 d1

Rotary One-touch Fittings Manifold Series KM

Applicable Applicable Port B min. port size Weight (g) size d D1 Part No. D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

5

Bore size (mm) B D E J M O d1 d2 YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 L UT YB-08 80 16 11 38 13 52 18 depth 12 C UA YB-10 100 19 14 50 17 62 21 depth 14 Material: Chromium molybdenum steel (Nickel plating) Part no. Bore size (mm) T1 T2 V W RS Weight (g) Part no.