Air Slide Table Series MXP

Contents Bore size (mm) MXP8-PS 8 10 12 16 MXP8-PS MXP10-PS MXP12-PS MXP16-PS !4 !8 !9 NBR, stainless steel Gasket (for plug) MXP10-PS MXP12-PS MXP16-PS A set of two of !4, !8 and !9 each Piston seal NBR O-ring Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

01-mxp-e

Contents Bore size (mm) MXP8-PS 8 10 12 16 MXP8-PS MXP10-PS MXP12-PS MXP16-PS !4 !8 !9 NBR, stainless steel Gasket (for plug) MXP10-PS MXP12-PS MXP16-PS A set of two of !4, !8 and !9 each Piston seal NBR O-ring Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

MY1

MY1M50-PS MY1M40-PS MY1M20-PS MY1M25-PS MY1M32-PS MY1M16-PS 16 17 19 Note) Two kinds of dust seal bands are available.

Parallel Type Air Gripper

MHZ16-PS MHZ20-PS MHZ25-PS 20,21,22 Seal kit MHZ2-S MHZ10S-PS MHZ16S-PS MHZ20S-PS MHZ25S-PS 20,21,22 MHZ2-(N) MHZ-AA1002(N) MHZ-AA1602(N) MHZ-AA2002(N) MHZ-AA2502(N) MHZ2-(N)1 MHZ-AA1002(N)-1 MHZ-AA1602(N)-1 MHZ-AA2002(N)-1 MHZ-AA2502(N)-1 Finger assembly 4,5,6,13 Mounting screw MHZ2-(N)2 MHZ-AA1002(N)-2 MHZ-AA1602(N)-2 MHZ-AA2002(N)-2 MHZ-AA2502(N)-2 MHZ2-3 MHZ-AA1002-3 MHZ-AA1602-3 MHZ-AA2002

MHx-OMU0057

010(10g) O C 15 - 32,40 1C 2 3 4.Assy :GR-S-010(10g) C 32 3 40 4 32 2 40 2.5 Assy 16 - 3-5./ 1025 / / / / 1 12 13 2 10,16; 20;25; 14 20,25; 3 15 C 4 5 16 A 6 17 A 18 NO 7 19 NC 8 20 NBR 9 21 NBR 10 22 NBR 11 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-D MHZ2-C MHZ10-PS MHZ16-PS MHZ20-PS MHZ25-PS 20,21,22 MHZ2-S MHZ10S-PS MHZ16S-PS MHZ20S-PS MHZ25S-PS 20,21,22 MHZ2-(N) MHZ-AA1002

CUJ

Bore size Contents 7 Piano wire Return spring CUJB4-S-PS 4 8 Sintered metal BC Bronze element CUJB6-S-PS 6 Above number 11 and an exclusive grease pack. 9 Magnet CUJB8-S-PS 8 10 Nickel plated Steel Rod end nut CUJB10-S-PS 10 11 NBR Piston seal 12 NBR Rod seal 13 NBR Tube gasket 5 Mini Free-mount Cylinder Series CUJ Dimensions for 4 Double Acting/Single Acting Without magnet/CUJB4 Note) The

MK

50 MK-50-PS 63 MK-63-PS Bore size (mm) Part no.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

MHK2

MHK-A2501 P3318403 P3318404 MHK20-PS MHK-A2001 P3318303 P3318304 MHK16-PS MHK-A1601 P3318203 P3318204 MHK12-PS MHK-A1201 P3318103 P3318104 wyu !

MHK2

MHK-A2501 P3318403 P3318404 MHK20-PS MHK-A2001 P3318303 P3318304 MHK16-PS MHK-A1601 P3318203 P3318204 MHK12-PS MHK-A1201 P3318103 P3318104 wyu !

ZSM1-115/121

Example: Analog output = 1 to 5 [V] F .S. = 5 [V] 1 [V] = 4 [V] 3 [% F .S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 120 [mV].

STAINLESS STEEL CYLINDER

Replacement parts Rubber bumper Air cushion CG5*N*SR CG5*N*SV CG5*A*SR CG5*A*SV Bore size (mm) 20 CG5N20SR-PS CG5N20SV-PS CG5A20SR-PS CG5A20SV-PS 25 CG5N25SR-PS CG5N25SV-PS CG5A25SR-PS CG5A25SV-PS 32 CG5N32SR-PS CG5N32SV-PS CG5A32SR-PS CG5A32SV-PS 40 CG5N40SR-PS CG5N40SV-PS CG5A40SR-PS CG5A40SV-PS Seal material NBR FKM NBR FKM Rod seal Contents of the seal kit Rod seal Piston seal Piston

C95Series

l S.

Compact Cylinder with Air Cushion

Bore size (mm) Applicable switch Reed switch Solid state switch Bore size 20 25 32 40 50 63 80 100 Series Contents Order number RQB20-PS RQB25-PS RQB32-PS RQB40-PS RQB50-PS RQB63-PS RQB80-PS RQB100-PS Bracket no.

CUJ

Bore size (mm) Piano wire u Return spring CUJB4-S-PS 4 Sintered metallic BC i Bronze element CUJB6-S-PS 6 Set of nos. above !1 and an exclusive grease pack. o Magnet CUJB8-S-PS 8 Steel Nickel plated !0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

MHx-OMY0005

MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12-PS MHF12-PS MHF12-PS 202122 MHF2-D,D1(12,16,20)GR-S-010(10g) () MHF2-D2(12) GR-L-005(5g) () GR-S-010(10g) () MHF2-D2(16,20

MHF2-E

Contents MHF2-8D MHF2-8D1 MHF2-8D2 For guide: GR-S-010 (10g) Seal kit MHF8-PS MHF8-PS MHF8-PS-2 12, 20, 21 For cylinder: GR-L-005 (5g) Order with the order No. as parts No. 12, 20 and 21 are provided as a seal kit.

MHF2

Description Contents MHF2-16D2 MHF2-16D1 MHF2-16D 20, 21, 22 MHF16-PS MHF16-PS MHF16-PS Seal kit 3, 4, 5, 6, 14, 16,19 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit No.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Kit components 1 70% flat black Rod cover Aluminum alloy 40 CHA40-PS 2 70% flat black Head cover Aluminum alloy 50 CHA50-PS Hard anodized Aluminum alloy 3 Cylinder tube 63 CHA63-PS Carbon steel Nos. 17 to 22 from the chart at left 80 CHA80-PS 4 Hard chromium electroplated Piston rod Carbon steel 100 CHA100-PS 5 Piston Aluminum alloy 125 CHA125-PS 6 Cushion ring Rolled steel 160 CHA160-PS

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

MBB50-PS MBB50-PS-W Cushion ring nut 20 Chromium molybdenum steel Quench hard chrome plated MBB63-PS MBB63-PS-W Hexagon socket head cap screw 21 Chromium molybdenum steel Black zinc chromated MBB80-PS MBB80-PS-W Rubber cap 22 Chloroprene rubber MBB100-PS MBB100-PS-W Cap A 23A Black coated Aluminum casting The seal kits consist of items #0, #1, #2, #4 and #6.