3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

mounting style [-D].

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

MHF2

4.5 1 1 Note) There is no protrusion for sections of the table with no values entered. 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-M9(V) D-M9W(V) MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Thermo-con/Rack Mount Type

mm 176 mm HECR012-W2 HRCR010-A2 Air-cooled Air-cooled Water-cooled 200 W, 400 W, 510 W 800 W, 1 kW 800 W, 1.2 kW Mountable in a 19-inch rack Space can be saved by mounting multiple pieces of equipment together in a single rack.

ZSE F/ISE

2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D.

Series IDG

Note 2) When symbols C or D are specified, an auto drain with a part number shown on page 18 is mounted.

RZQ

D-A80 U B + First-stage stroke U B A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-Y7NTL D-F7BAL B + First-stage stroke U SMC U B A D-A73C D-A80C D-J79C B + First-stage stroke U U B A D-A79W D-F7WV D-F7V D-F7BAVL B

VQC

) 258-9200-www.stevenengineering.com D-sub connector 6 One-touch fitting Terminal no.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 258-9200-www.stevenengineering.com 14 (2, 4 port) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P

VP300/500/700

) (D, Y) VS N.C.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

/M5W/M5TL D-E7A/E80A D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

S070

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size OUT port Symbol SUP/EXH port (Applicable tubing) Write sequentially from the 1st station on the D side.

ML2B

RE A B D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV Bore size (mm) Auto switch model REC CX A B CY 25 32 40 91 102.5 126.5 131.5 180 206 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Caution on Handling Auto Switch Mounting of Auto Switch MK(2) When mounting

CQM

Area: (800) 258-9200-www.stevenengineering.com HS A B 32/40/50 (mm) D-M9 V, D-F9 WV D-A9 V Auto switch model Symbol A B Hs A B Hs 12 16 20 25 32 40 50 17 19 22.5 24.5 27 30.5 36.5 0 0 3.5 5.5 5 7.5 10.5 1.5 2 6 7 8 12 10 19 21 24 26 29 32.5 42 4.5 4 7.5 9.5 9 11.5 14.5 5.5 6 10 11 12 16 14 Bore size (mm) HS A B Reed switch D-A7 D-A80 D-A73C D-A80C D-A79W Solid state switch D-F7V D-J79C D-F7WV

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

MLGC

-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA Hs 14.5 CNS CLS CLQ MLGP RLQ Auto switch D-B5/B6, D-G5/K5 MLU ML1C DHs 14.5 -X 20Data Auto switch D-B7/B8, D-G7/K7 Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-G5 D-K59 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-B7/B8 D-B73C D-B80C

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

V100 SY Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 SYJ VK Dimensions L (mm) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Applicable fittings fitting d Model A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 16 16 18

ZPT/ZPX

B D ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14 M8 x 1.25 40 41.4 28.4 43.2 20.5 32 62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10 x 1.5 50 51.9