13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50
13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50
13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50
Non-standard motor switch Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Non-standard motor P N S Ground ball screw Rolled ball screw Slide screw None N.C. (B contact) 2 pcs.
SX Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv P N P N P N 1 8 1 4 1 4 SS5X3-20 SS5X5-20 SS5X7-20 Rc Rc Rc 0.72 1.9 3.6 0.29 0.28 0.31 0.18 0.48 0.93 0.80 2.2 3.6 0.36 0.20 0.27 0.21 0.53 0.88 C6 C8 C10 Note) The value is for manifold base with 5 stations and individually
Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set
VEX1 1 9 P Rated voltage (Only with solenoid) Thread type Port size 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VAC 12 VAC 240 VAC (50/60 Hz) 1 2 3 Symbol Port size Thread type Symbol Sub-plate A B 1/8 1/4 Nil Rc G NPT NPTF F N T 4 5 6 7 Base gasket VEX1 11 2 9 Other Option Body size Port size Electrical entry (Only with solenoid) Port size Body size Electrical
(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description
) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P R1 R2 Indicator light 2-6.5 mounting hole 42.5 42.5
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5
ZZ + Stroke Rod Side Flange Style M M Stroke range (mm) Bore size (mm) B E F FX FD FT H B 20 25 32 40 50 63 80 100 Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 40 44 53 61 76 92 104 128 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 35 40 40 50 58 58 71 71 LT LH LT LX X Y Y X LZ LS + Stroke
N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage
Lead 20: EQY25H 100 Min. 25% Max. 50% 10 20 30 40 50 90 70 80 60 0 Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 40C or less 50 or less 100 Pushing force 45% 50% 70% 42 Battery-less Absolute (Step Motor 24 VDC) Easy to
hole DIN terminal Conduit terminal S Q F Cable 6 to 12 Q2 S2 F D G1/2 (44) 31.5 32 25 Y T R E C R C G1/2 (1.5) (1.5) Y E B1 B A A B1 B 2 x P Port size 2 x P Port size U W M U W M 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole X (mm) Mounting bracket dimensions Port size P Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50 21 22.5 22.5
(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.
B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.
(Supply port of rod end) P PB + Stroke MA C [ 25.5] E N (Supply port of head end) P (Supply port of rod end) P (Plug: Width across flats 8) (Supply port of head end) P (Plug: Width across flats 8) [SB] [SA] (Breathing port on guide) M5 x 0.8 (Plug: Width across flats 8) Note 3) PD QA PA PB + Stroke (mm) A B Bore size C D E F G H J K L MB MA N P PA Standard stroke 30 st or less 31 to 50 st