CM2

port size P Spring return One-touch fitting port size P Spring extend NCA D-X 20Data MM LZ LX H1 LT H LH NN G LD Z AL F B1 LC Y A B2 D H2 I B K N NA P X Bore size (mm) 20 55 40 3.2 41 25 8 6.8 21 13 4 8 18 8 40 5 20 15.5 13 26 5 8 28 M8 x 1.25 15 24 M20 x 1.5 1/8 25 55 40 3.2 45 28 8 6.8 25 13 4 8 22 10 47 5.5 20 19.5 17 32 6 8 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 32 55 40 3.2 45 28 8 6.8

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

) (4.9) 1/8 (P, R port) Manual override (Pitch) P=16 21 Approx. 300 (Lead wire length) 4.5 L2 L1 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + 54.1 [61.1] 38.7 25.5 (Pitch) P=16 21 One-touch fitting (A port) Applicable tubing O.D.: 4,5/32" 7.5 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 49 49 49 49 P R P R P R P R 57.2 [59.4] 52.2 67 [69.2

Proposals for Energy Saving

(P .E.)

CG1

Refer to p.1.7-12 and 1.713.1.

MGP

P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

CM2

Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Membrane Air Dryer

purge air discharge (Option: P) !

EX120/121/122

1 End plate (Output side) P. 1678 SI unit Input block e Waterproof cap P. 1672 o Power cable with connector P. 1677 e Waterproof cap P. 1672 w Power cable with connector (for SI unit) P. 1672 !

CRBU

Refer to p.1.2-7 for further information.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

less No Z80 IC circuit P P Y59A Y69A P p P 3 wire (NPN) IC circuit 5V 12V Y7P Y7PV P p P 3 wire (PNP) IC circuit Y59B 12V Y69B P p P 2 wire Y7NW Y7NWV P p P 3 wire (NPN) 5V 12V Diagnostic indication (2 color indicator) IC circuit Y7PW Y7PWV P p P 3 wire (PNP) Relay, PLC Grommet Solid state switch Yes 24V Y7BW Y7BWV P p P Water resistant (2 color indicator) Y7BA p P 2 wire 12V P5DW Magnetic

Hygienic Design Cylinder Series HY

4 x UC depth UD F UA (4.7) PB + Stroke (Supply port of head end) P C E N B + Stroke A + Stroke (Supply port of rod end) P (Plug: Width across flats 8) (Supply port of head end) P (Plug: Width across flats 8) (Breathing port on guide) M5 x 0.8 (Plug: Width across flats 8) Note 2) PD CJ5 CG5 QA PA HY PB + Stroke C M (mm) A B Bore size C D E F G H J K L MB MA N P PA Standard stroke 30 st or

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

Rotary Actuator/Vane Type

L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Q1 = M L1 = L1 + (3 x P) L2 = The maximum dimension L1 is, as a rule, twice the thread size. (Example) For M3: L1 = 6 mm The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Port) (42.9 ) (20.0) (15) (5) (7.5) 5.0 n-M5x0.8 P=10 15.0 *Dimensions 9 122 171 191 225 235.5 n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 101 121 150 160.5 3 62 111 131 162.5 173 4 72 121 141 175 185.5 5 82 131 151 175 185.5 6 92 141 161 187.5 198 7 102 151 171 200 210.5 8 112 161 181 212.5 223 10 132 181 201 225 235.5 13 162 211 231 262.5 273 14 172 221 241 275