Air Cylinder

G 4 x J 4 x FD G Width across flats B1 RY FB FY D E e C B H1 N RT N FT AL C B f L 10.2 A K h + L S + Stroke H M FX FZ ZZ + L + Stroke ZZ + Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E FB FD FT FY FZ G H1 J K KA M FX (mm) 40 50 63 80 501 to 800 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 71 88 9 9 12 20 23 28 29 42 58 64 84

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

JXCx-OMU0026

600 700 800 600 700 800 Max. speed [mm/s] 500 250 100 900 630 550 500 420 330 250 230 180 0 Min. speed [mm/s] (Independent and interpolation) 10 5 20 12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed

Multistage Ejector Series ZL112/212 1

0 ZM ZH o ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY e u r y ZQ ZF ZP Description Part no. Part no. Note Component Parts Replacement Parts ZCU Description Material Sound absorbing material A No. No.

Compact Cylinder

2 y q e !3 o !0 With auto switch (Built-in magnet) 32 to 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 r t i !4 y q e !3 o w u !0 !1 M: Rod end male thread Component Parts Replacement Parts: Seal Kit No. Description Material Note Bore size (mm) Kit no.

REC

8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !

RSH/RS1H

9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

Cylinder with Lock

D E D B B1 C BH1 H K A BN N1 F AL H1 MM H1 ZZ + (2 x Stroke) S + Stroke H + Stroke A K AL MB B B1 C B C F N MA With rod boot e e * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No. Description Material Note Component Parts (For single acting) No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 r y e !5 o !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Step Motor Driver （ Pulse input type ）

x 1 / 10 x 100 = 8000[pulse] Travel speed: 800 x 1 / 10 x 100 = 8000 [pulse/sec] Acceleration / deceleration time: 100 / 3000 = 0.1 [s] Travel amount: 800 x 1 / 10 x 30 = 2400[pulse] Travel speed: 800 x 1 / 10 x 30 = 2400 [pulse/sec] Acceleration / deceleration time: 30 / 3000 = 0.01 [s] (1) Positioning operation starts until the start position

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Description Body Resin q SY Spool valve Aluminum/HNBR w Pilot valve assembly e SYJ Port plug Resin/NBR VVQZ100-CP r VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ200/300 Metal seal type Rubber seal type VT VP r e w q r e w q VG VP S070 VQ N.C. N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Ejector Valve Unit Series ZYY/ZYX 1

0 r t Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e !2 Section A-A' (Ejector) !3 i w u o y q Section B-B' (Solenoid valve) Component Parts Replacement Parts Note Description Material Description Part no. No. No.

Cylinder with Lock Series CLS

800 900 160 200 140 Load mass: m (kg) Load mass: m (kg) 180 1000 RLQ 700 800 900 600 125 160 500 MLU 600 140 400 500 125 400 MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg)

HRS100/150

Required installation space 800 mm or more Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 800 mm or more Piping 2000 mm or more Caution 1. Regarding the circulating fluid and facility water pipings, consider carefully the suitability for temperature, circulating fluid and facility water.

Modular F.R.L. Unit

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Refrigerated Air Dryers Series IDF/IDU

HAA HAW AT IDF IDU C IDFA F IDFB M ID N IDG L P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.