CS1

256.5 75 0.2 Stroke 277.5 106 277.5 256.5 to 1200 153 135 85 45 281 0.2 Stroke 299 115 303 285 Lube Non-lube to 998 153 135 281 90 45 0.2 Stroke 299 120 308 290 Lube Non-lube Other dimensions are the same as standard style.

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

MGP

Bearing type M Slide bearing L Ball bushing Bore Auto switch type Nil W/O auto switch (built-in magnet cylinder) 120 12mm 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm 80 80mm 100 100mm Compact stroke (mm) Port PT N NPT Ports w/ bolt on tool plate Applicable auto switches Load voltage Lead wire length (m) Note 1) Auto switch model Electrical entry direction Special function Electrical

Proposals for Energy Saving

(Special order product) Series ZL112, 212 Proposal 9 Vacuum Air reduction for vacuum ejectors Suction transfer Vacuum ejector for water soluble coolant removal Vacuum ejector Linear vacuum ejector Negative pressure detection valve Digital pressure switch for general purpose fluid (Special order product) Series ZH Series ZU (Special order product) Series ZSE5B/ISE5B Page 150 140 142 137 120

0.4

RD SD RUN POWER 120 80 10.6 4 46.2 ERR T/R RUN MODEL SB (SI No.EX124-SMB1) 0 1 DIP SW. L8 = 16n + 118.5 100 Drawing shows a SC case.

Air Cylinder Series CM2

60 4 7 10.5 13 17 10 32 37 33.5 6 8 26 32 40 45 19.5 8 22 75 60 4 7 10.5 13 17 12 32 37 37.5 6 8 26 40 52 50 21 11 24 82 66 36 5 7 13.5 16 22 14 41 47.3 46.5 8 10 32 With Air Cushion Built-in One-touch Fittings (mm) (mm) (mm) Bore size Bore size NN NA KA N Z ZZ P S MM K Bore size N1 Q P WA G 8 1 20 20 20 24 6 15 107 116 62 5 21.5 13 6 17.5 8 M8 x 1.25 M20 x 1.5 8 1 25 25 25 30 8 15 111 120

•

(n:: 4, 8, 12, 16 ) (n ::: 4.8, 12, 16) Wrlh2 pes jDifferenl sllriaces. 11 5 120 20 Samesuriace), Wrlh 1 pc D-M90AL ---.-~~-, 115 +40(n 2 4) '~O + 40(12 4; 20+40In ;2) Wllh n pes. (n = 2. 4. 6. S .. ) (n = 4 . 8, 12, 16...),_-+_ ~4. 8. 12.16.. -) D~ F5D1.J5 CJ Same surface) With 1 pc.

CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 3.5 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H Dimensions When Mounting a Single/Double Knuckle Joint together with a Rod End Nut A H Bore size (mm) 125 140 160 65 125 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

CL

Stroke Refer to p.1.9-3 for maximum stroke of CA1 series 40 to 100 and p.1.10-3 for maximum stroke of CS1 series 120 to 160. Minimum Strokes for Auto Switch Mounting Refer to following pages for minimum strokes for auto switch mounting.

Table of Contents

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31 1 Vacuum Ejector Box Type (Built-in

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

220 230 AH 4 x AB AO AO SA + Stroke E1 TR AT 125 Max. 157 90 90 Max. 25 8 16 250 270 Rod flange (F) [mm] Bore size [mm] R TF FB E2 UF W MF 4 x FB 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 E2 R W MF TF UF 125 90 180 16 Max. 157 Max. 224 45 20 Head flange (G) [mm] Bore size [mm] MF ZF

CKZ2N

Arm Mounting Position: A, B, C, D A B C D Arm opening angle 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 denotes tool attachment surface.

0.4

S kit (Serial transmission kit: EX600) Power supply with 7/8 inch connector Construction M kit L kit T kit P kit F kit S kit Exploded View of Manifold Manifold Optional Parts Safety Instructions Specific Product Precautions (5.25) L1 L2 (Rail mounting hole pitch: 12.5) L4 L7 5.5 L6 38.5 8 26 47 Communication connector Indicator light 1 1 P = 16 74 (12) Manual override 0.9 Marker groove 120

Cylinder with Lock Series CNS

PT) BQ Plug with breathing hole CL M GA BC element T G G FA GB Rc(PT) BP Unlocking port 2-Rc(PT) P GL GR Width across flats KA Cylinder port MM Q D EA E V AL A K F VA BN C B N N 4-J S + Stroke M H ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 to 1000 50 47 145 205 1/2 3/8 115 120

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

20 25 32 40 50 63 80 44 48 60 74 78 100 120 5.5 6.6 9 9 9 12 14 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Head flange style: (G) 4 x FD B FY FT FZ FX ZZ + Stroke (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 20 25 32 40 50 63 80 44 48 60 74 78 100 120 5.5 6.6 9

Parallel Style Air Gripper Series MHZ

MHZ2-25C/MHZL2-25C MHZ2-6C/MHZA2-6C 140 Pressure 0.7 MPa 8 120 0.6 MPa Pressure 0.7 MPa Gripping force (N) Gripping force (N) 100 6 0.5 MPa F 0.6 MPa 80 0.4 MPa 0.5 MPa 4 60 0.3 MPa 40 0.4 MPa 2 0.25 MPa 20 0.3 MPa F 0 10 20 30 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) Internal Grip MHZ2-10C/MHZL2-10C MHZ2-32C MHZA2, MHZ2, MHZL2 250 Pressure 0.7 MPa Pressure 0.7 MPa

VZ3000

Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 2 position 0.47 0.41 0.41 0.47 0.13 0.13 M5 x 0.8 M5 x 0.8 0.49 0.46 0.49 [0.39] 0.40 0.43 [0.35] 0.42 0.44 0.37 0.51 [0.38] 0.44 0.47 [0.39] 0.45 0.13 0.12 0.14 [0.10] 0.12 0.13 [0.10] 0.12 VZ320--M5 3 position 130 75 120

EX120/121/122

indicator LED INPUT UNIT 1 0 NPN 3 2 PWR 5 4 7 6 0 1 3 2 120 PNP 4 5 6 7 Input equipment connection connector (M12, 5 pins, plug) 61.5 4 54 EX 69.6 End Case Assembly EX240-EA2 EX240-EA4 120 120 22.1 98.8 5.6 2 x M5 (for mounting hole) 61.5 61.5 14 14 28.6 EX240-EA3 120 61.5 14 23.5 1663 Integrated Type/ For Input/Output Series EX250 u VQC1000/2000/4000 S0700 SV1000/2000/3000 e r q w y t

IO-Link/ELECTRO-PNEUMATIC REGULATOR

COMMUNICATION The range of the LED pressure display is different according to the pressure range and the unit of the display. unit ITV*01* ITV*03* ITV*05* ITV209* MPa 020 to .120 100 to 600 180 to .A80 Kgf/cm2 020 to .120 100 to 6.00 180 to A.80 bar 020 to .120 100 to 6.00 180 to A.80 PSI 30 to 18.0 140 to 84.0 -26 to 156 kPa -20 to 120 -100 to 600 -180 to A80 16 to -96 (note1)The mark ""

LG1H

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface