0.4

37 or less 56 or less Metal seal Closed center SQ2341 1.9 1.8 0.17 0.29 0.45 0.46 175 34 or less 44 or less Rubber seal SQ2000 SQ2440 1.9 2.4 0.17 0.14 0.55 0.46 180 37 or less 56 or less Metal seal Exhaust center SQ2441 1.9 3.1 0.17 0.14 0.58 0.46 175 34 or less 44 or less Rubber seal SQ2540 2.3 2.1 0.17 0.18 0.47 0.51 180 37 or less 56 or less Metal seal Pressure center SQ2541 2.5 1.8

Vacuum Module Series ZX

(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 78 66 6 135 123 8 173 161 10 211 199 2 59 47 4 97 85 5 116 104 7 154 142 9 192 180 11 230 218 12 249 237 13 268 256 14 287 275 15 306 294 1.2-66 Series SYJ7000 21 Type Manifold: Top Ported/SS5YJ7-21Station Grommet(G), (H) Manual override 4-4.5 (Mounting holes) Depress and turn to operate and lock override.

Series VQ Metal Seal/Rubber Seal Body Ported

Turn the manual override clockwise by 180 to set the mark to A and press it in the direction indecated by the arrow. It will be locked set in a (Passage: P A) state. Turn the manual override counterclockwise by 180 to set the mark to B and press it in the direction indicated by the arrow. It will be reset in a (Passage: P B) state. (It is reset when shipped.)

ZX

(PD port) Common EXH port Pitch = 21 M5 (or M6) Individual vacuum supply port (PV port) Common vacuum supply port (PV port) Common supply port for vacuum switch valve (PS port) Stations (mm) 8 7 180 192 197 6 159 171 176 5 138 150 155 4 117 129 134 3 96 108 113 2 75 87 92 1 54 66 71 Symbol L1 33 45 50 L2 L3 13-2-56 56 Vacuum Module: Vacuum Pump System Series ZX (In the case of individual

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The size of the stopper delines lhe rotalion angle of 90, 180 or 270'. Adjustable stops may be provided to adjust any angle ot rolation of the unit. ,rOar*$ 180' 900 Fig 6,22 Vane Type Rotary Actuator I Z I N G R O T A R Y A C T U A T O R S orque and Inartia Linear cylinders have a cushion to reduce the impact when lhe piston hits the cover.

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Leave blank il nol external shock absorbertvoe 180'standard type 90o slandard lype 180" svmmetr callype 90" symmetrcal tvpe ' Ledve ball fo, A s oppe bo Ilyoe a_d F Inrera shocl abso Der type a#, c{ "..' r,:i f'*y4i ffi& n .

4/5 Port Air Operated Valve Series SYJA3000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1-5-44 5 Port Solenoid Valve Rubber Seal Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in One-touch

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Nil N H Port thread type Bore size Nil TN TF Rc NPT G Air-hydro Lube, Non-lube 125 140 160 180 200 250 300 125 140 160 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. Bore size (mm) 125 140 160 180 200 250 300 For How to Order with auto switch, refer to page 417.

NCG/CG1

CG1 Rod Side Trunnion Style mm TV TV ZZ + Stroke 126 to 200 st ZZ Z Bore size (mm) 1 to 50 st 51 to 100 st 101 to 125 st Clevis pin and snap ring are shipped together. 20 25 32 40 46 131 156 181 Head side trunnion style: NCGTN/CG1TN 51 136 161 186 211 Bracket mounting range 51 138 163 188 213 62 155 180 205 230 2-TD8 (Pin O.D.)

SYJ300/500/700

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Vacuum Ejector Series ZM

Vacuum pressure (kPa) 70 105 70 Air consumption ZX 60 90 60 50 75 50 ZR Suction flow rate 40 60 40 ZM 30 30 45 ZMA 20 20 30 10 10 15 ZQ 0 0 0 0.0 0.6 0.5 0.4 0.3 0.2 0.1 0 70 50 60 30 40 20 10 ZH Flow rate l/min (ANR) Supply pressure (MPa) ZU Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: S 0.45 MPa ZL ZM13S ZY Exhaust Characteristics Flow Characteristics ZF 90 180

CG1

Front trunnion (mm) CA1 126 to 200st ZZ Z Bore size (mm) 1 to 50st 51 to 100st 101 to 125st CS1 20 25 32 40 46 131 156 181 51 136 161 186 211 51 138 163 188 213 62 155 180 205 230 Clevis pins and snap rings are attached.

IDX-OM-W010

/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 100V AC 10A Circuit Breaker (Note 3) 200V AC 5A 10A Condenser Plate fin tube type with forced air cooling Refrigerant R134a (HFC) Refrigerant Charge(AC100V/200V) g 705 115 5 150 5 180 5 200 5 250 5 260 5 350 10 Drain Connection Rc3/8 Rc1/2 Rc3/4 Rc1 Drain Connection 10mm Coating Color Panel: Urbanwhite 1 Base: Urbangray 2 Weight

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !

Rotary Actuator NCRA1 Series Single Rack and Pinion

'w Double rod nd 90_ 90o 100 _100o 180 _ 1800 190_.190. W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

Shock Absorbers and Rate Controls

l 240 cff: E 180 160 o 140 q 120 i 1oo 240 260 ^ 244 E o d F{ o. E 20o > 180 o F 100 ? u o c 6 0 4 A 20 0 20 0 0 0.2 0-4 0.6 0.8 1 1.2 1.4 TOTAL ENERGY/CYCLE (inlbs/c) (thousands) I Shack Ab*orhers Adjustable Hydraulic Series @gllc. High Performan@ (HP) Series Adjustment Knob -T g G _-_L Hex Jam Nut Hex Jam Nuts l{ominol (oil Spring lorre (tol nor. Propelling torce (il) 0llin!

LG1H

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) 110 20 95 95 A () () (150) A B 100 200 300 400 Stroke Model LG1H212NA-100-F LG1H212NA-200-F LG1H212NA-300-F LG1H212NA-400-F 60 160 260 80 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Thermoelectric Bath

Liquid tank 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size W Water-cooled Radiating method Controller A HEBC002 C Controller Communication A B RS-485 RS-232C 163 Series HEB Specifications (For details, please consult our Product Specifications information.)

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

M3 4 M3 4 3 90 2 AS-10AB 5 135 2 AS-11AB 7 180 2 AS-12AB 9 220 2 AS-13AB Ex.) AS2002FS-06 When connecting 4 pcs. and mounting L-brackets on both sides AS-20A Speed controller AS2002FS-06 4 pcs. 3 111 2 L-bracket AS-20L 2 pcs.