EX510

15 e t y y t Shown with cover removed.

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__~LL'O~adjV~~tal~e~~A~",O)~SWil~~'m~ode~'L~ e'd j~Wr e,~~ngl~h~~ ' ~)p~w'M1 W~ . I TyPe . SpecialfUnction Electrical (O"IP"I) DC AC ":;~~~g 8a::1, (~~) .. 1 .I ? 1~ ICO!I.""'rI Applicable load ~? I ry M9N IC ,0 . I )wi,. (NPN) ~e~ I. 24V , . 12 V _ M9P Grommet M9B 2wire 'IOOV.2roV J51 1, 12 V ;Terminal 1 3-wire (NPN) G39 11 ,ICc",,"" 12 V K39 11 R,'ay.

Low Profile Air Gripper Series MHF2

7.7 14.8 15 19 25 E 4 x 3.4 through (Mounting hole) MHZ 0 0.1 20 27 1 27 1 MHF 4 x 5.5 M5 x 0.8 Close: 0 +0.1 0 Finger opening port E-E MHL Open: 481 Use the attached hexagon socket head screws for mounting holes.

Compact Rotary Actuator

r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions

RSQ

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

High Power Cylinder Series RHC

2 i e !0 o w !6 !5 !4 !3 y r t !1 A A Enlarged view of A Component Parts Description No.

17

Dimensions MGPM (Slide bearing) A, DB, E Dimensions (mm) (mm) Bore size (mm) A E DB Bore size (mm) A E DB 50 st or less 93.5 93.5 109.5 109.5 Over 50 st 200 st or less 129.5 129.5 150.5 150.5 Over 200 st 15.5 9 16.5 11.5 50 st or less Over 50 st 200 st or less Over 200 st 50 st or less Over 50 st 100 st or less Over 100 st 200 st or less Over 50 st or less 96.5 96.5 112.5 112.5 Over 50 st

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

MXW

7 y r e t w q @1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !4 !1 !3 !2 @0 !9 o u i Component Parts No.

Escapements Series MIW/MIS

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

9 #4 #5 #1 MY CY @7 @8 t @9 @4 @4 @4 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMetal stopper Shock absorber e !8 A -X i !1 !0 @6 o @0 20Data !3 !4 !5 !6 !2 @2 @1 Detail drawing of part A Component Parts Note Note Material Material No.

MHC2-6/MHCA2-6

MHC D M9B 6 2 6 2 A D MHC Short body (Auto switch not attachable) Made to Order Refer to page 623 for details.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

-/22Double Foot Style (M) / CJ2M, CJ2M 10112122Rubber bumper View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Nil S n Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type 2 pcs. 1 pc. n pcs.

Pin Cylinders Series CJP2/CJP

CS2 Panel mount type Embedded type i e u q r w t y Component Parts No.

51

Head Flange: CG3GN Bore size Stroke With rubber bumper Width across flats KA GA GB 4 x FD 8 x J 2 x P F R0.5 H1 0 E 0.05 MM D FX 0.15 0 E 0.05 I B C Corner of the cover (20 to 63) H A AL Width across flats B1 Width across flats NA F FT C FX 0.15 S + Stroke ZZ + Stroke B End boss is machined on the flange for E.

MHC2

1 e !