Compact Electric Actuator Series LG1

C plane to A plane D plane to B plane 0.1 or less 0.1 or less Bottom mounting Top mounting Maximum work load (N) Repeatable positioning accuracy (mm) Horizontal Mounting position Stroke (mm) Motor output (W) Typical model Maximum speed (mm/s) Individual models Applicable controller model Feed screw 100 200 300 400 500 600 700 800 9001 0001 200 Ground ball screw lead 10mm Rolled ball screw

SMC Electronic Switch Series Variations

10.2 8 10 17.6 10 5.5 2-3.3 Mounting hole 3.10-4 ZSE2/ISE2 Dimensions/Standard: ZSE201 T1 01 T1 01 T1 Grommet style/ZSE2-15 Connector style/ZSE2-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 Lead wire length 600 15 (3000) H H L L 20 20 Lead wire length 600 Lead wire length 600 Lead wire length 600 (3000) 9.5 39 8.5 39 8.5 3.5 3.5 3.5 Mounting hole

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

5

Auto Switch Mounting Height (mm) D-B5m D-B64 D-B59W D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F Auto switch model D-F5m D-J59 D-F5mW D-J59W D-F5BA D-F59F D-F5NT D-Z7m D-Z80 D-Y59m D-Y7P D-Y7BA D-Y7mW D-M9m D-M9mW D-M9mA D-A9m D-A3mC D-G39C D-K39C D-A44C D-A3m D-G39 D-K39 D-A44 D-A5m D-A6m D-A59W D-M9mV D-M9mWV D-M9mAV D-A9mV D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW Bore size Hs Ht Hs Ht Hs

0.4

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Cylinder with Lock Series CLS

Auto Switch Mounting Height (mm) D-Z7/Z80 D-Y5/Y6 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BAL Hs D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL Hs Auto switch model D-A9 D-A9V D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A3 D-G39 D-K39 D-A5 D-A6 D-A59W D-A44 Bore size (mm) Ht Ht Ht Ht Ht Hs Hs Hs Hs Hs D125 140 160 180 200 69 69.5 71.5 69.5 69 69.5 116 126 75.5 69.5 74.5 70 -X 76 76 77.5 76 76 76 124 134

Cylinder with Lock Series CNS

Auto Switch Mounting Height (mm) D-Z7/Z80 D-Y5/Y6 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BAL Hs D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL Hs Auto switch model D-A9 D-A9V D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A3 D-G39 D-K39 D-A5 D-A6 D-A59W D-A44 DBore size (mm) -X Hs Hs Hs Hs Ht Ht Ht Ht Ht Hs 125 140 160 69 69.5 71.5 69.5 69 69.5 116 126 75.5 69.5 74.5 70 Individual -X 76 76 77.5 76 76 76

Cylinder with Lock Series CLS

Hs 33 Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht Hs A 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5

MTS

30 25 20 15 10 5 D-A9 x x x (2) 2 pcs. on same side Standard piping type(1) D-M9, D-F9W x x (2) D-A9V x x x D-A9 (2) x 1 pc. each on 2 sides D-M9, D-F9W (2) 2-port size D-A9V x D-A9 (2) x x x 2 pcs. on same side Axial piping type D-M9, D-F9W (2) x x D-A9V x x x D-M9V, D-F9WV x x D-F8 D-A9 x (2) 1 pc. each on 2 sides D-M9, D-F9W (2) D-M9V x 2-port size D-M9V, D-F9WV D-F8 Note 1) With the

7

E U 300 1.2 7.5 T 5.5 5.5 A b a IN OUT B 2 x P Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Digital Flow Switch (Integrated display type) ( compatible)

PF3W704 PF3W720 PF3W740 PF3W711 -98No.PF-OMW0010-D PF3W721 -99No.PF-OMW0010-D Flow characteristics of the flow rate adjustment valve PF3W704S PF3W720S PF3W740S -100No.PF-OMW0010-D Dimensions PF3W704/720/740/711 Basic type Symbol Piping port size A AA B D E F H J K L N P Model PF3W704 3/8 70 50 30 66 40.6 15.2 14 35 26 18 13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 18 39 30 18

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

Single Axis Electric Actuator Serriies LJ1S Slider Guide

A B C D Switch Internal Circuit Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Digital Flow Switch

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .