Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

SYJ300/500/700

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

Series IDG

300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min

Mechanically Jointed Rodless Cylinder Series MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

200 100 100 200 0 10 20 30 40 10 20 30 40 Data Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 10-9-19 Series RSA Dimensions mFX+0.2 FZ 4-N through 8-O counter bore Workpiece transfer direction L CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size (mm) N CD

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Driver side crimping terminals (Note 2) Applicable tool Symbol Crimping Manufacturer Body Head Dice terminal a FVD5.5-4 YNT-1210S (Note 1)b 8-4NS YHT-8S c FVD14-6 YF-1 E-4 YNE-38 DH-112 DH122 d FVD22-6 DH-113 DH123 (Note 1)e 38-6 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 (Note 1)f R60-8 YPT-60-21 TD-113 TD-125 Japan Solderless YF-1 E-4 YET-60-1 Terminal g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5

60

e h h c c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

240

3 e u !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Pilot valve symbol 200 AC 12 DC 100 AC 110 AC 220 AC 24 DC K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y q w Nil e Nil Y r t Nil y Nil u Nil i Nil o Nil !0 Combinations q to !

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Air Cylinder

E C B H1 H1 B1 AL AL C A A K K B F N F N H + Stroke S + Stroke H ZZ + 2 x Stroke d e 10.2 L f h + L ZZ + L + Stroke d d e e 10.2 10.2 f f L L + Stroke h + L + Stroke h + L S + Stroke ZZ + 2L + 2 x Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E F G H1 J K KA M MM (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

CS1

365 330 270 140 M30 X 1.5 326 212 23 20 33 76 60 65 55 80 70 96 30 15 49 With auto switch/125 to 200 only (mm) (mm) W/o rod boot W/ rod boot W/ rod boot W/o rod boot Stroke range (mm) Style Bore (mm) Style Bore (mm) S LS RY Y S X H ZZ1 h f e ZZ ZZ1 ZZ l 125 140 160 180 200 250 300 125 140 160 180 200 to 1400 110 98 164 296 188 98 45 133 75 40 20 273 296 273 0.2 Stroke Lube Non-lube Air-hydro

Table of Contents

r t y No. q w e r t y u i o !

Fieldbus System

1(P), 3/5(E) port] Applicable tube O.D.

Modular F.R.L. Units

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

V

18 NPN/1 setting, three revolution adjustment, analog 19 NPN/1 setting, 200 0 adjustment, analog 55 PNP/1 setting, 200 0 adjustment N O Z Z L E D I A M E T E R A 0.7: With Vacuum Release Valve B 1.0: With Vacuum Release Valve L E A D W I R E Blank 0.6m 30 3m 50 5m D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !