Compact Guide Cylinder , depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke 32 6.5 10.2 5.5 3.5 9.5 40 6.5 10.5 5.5 4 10 50 8.5 12.5 7.5 4 12.5 E The
CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000
CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000
ratio : 1 [kgf/L] Circulating fluid (volume) flow rate qv : 70 [L/min] Circulating fluid specific heat C : 1.0 x 103 [cal/(kgfC)] Circulating fluid outlet temperature T1 : 20 [C] Circulating fluid return temperature T2 : 24 [C] Circulating fluid temperature difference iT : 4 [C] (= T2 T1) Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W]
Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating
YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.
M4 x 0.7 x 14.5l, M4 x 0.7 (Hexagon bolt) (Hexagon nut) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V (Opposite side: Same) 4-M5 x 0.8 thread depth 4.5 (L) (Z) (Piping port) (Opposite side: Same) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) A B C D E F G H I J L Y
Dimensions (mm) A B C D E F G K L M N P Model IDFA100F IDFA125F Port size R2 670 460 335 107 700 1120 1276 267 1375 20 712 752 R2 1/2 700 655 350 78 935 IDFA150F E D B 10 note) A G F C N M L K Note) In addition to the overall length of the body, the filter mounting part (bracket) projects 10 mm.
E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth 6.5
C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.
Correction Factors Data A: Inlet Air Temperature Data C: Outlet Air Pressure Dew Point Data E: Air Flow Capacity Model IDF100FS IDF125FS IDF150FS Outlet air pressure dew point F (C) Correction factor Inlet air temp.
Peeling off or wearing of the side of the belt Belt corner becomes round and frayed thread sticks out. c. Belt partially cut Belt is partially cut. Foreign matter caught in teeth other than cut part causes flaw. d. Vertical line of belt teeth Flaw which is made when the belt runs on the flange. e. Rubber back of the belt is softened and sticky. f .
Nil R H W Through hole Front taps Rear taps Double side taps Piston rod C dimension End thread size F dimension Interchangeable contents Dimensions CHKGB--XC62 F with effective thread depth G Width across flats f c D d a Width across flats E e b g H h + Stroke X with thread depth Y Note1) J B + Stroke C Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11
Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
L D d m t d H B C l IY-G04 IY-G05 C type 10 for shaft 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 C type 14 for shaft 10 14 -0.040 -0.076 -0.050 -0.093 9-12-19 20 Simple Joint: 32 to 63 Type A Mounting Bracket 2-D T1 T2 M W V U F B E (mm) Joint and Mounting Bracket (Type A, Type B) Part No.
L D d m t d H B C C type 10 for shaft 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 IY-G04 IY-G05 C type 14 for shaft 10 14 -0.040 -0.076 -0.050 -0.093 14 Series RLQ Simple Joint/32 to 63 A type mounting bracket 2-D T1 T2 M W V U F B E (mm) Joint and mounting bracket (A type, B type) part no.
Dimensions (mm) MGPWL, MGPWA 32 to 63/A, E Dimensions (mm) Bore size (mm) A E Bore size (mm) A E 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less 50 st or less Over 25 st 100 st or less Over 50 st 100 st or less Over 100 st Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st D20 25 32 40 50 63 57.5 53.5 62.5 55.5 37.5 33.5 42.5 35.5 20.5 16.5 21.5 14.5 109.5 109.5
-X 545 C(L)KU32 Series Auto Switch Mounting 2 Auto Switch Mounting Height Applicable cylinder: C(L)KU32-X2321 C(L)KU32-X2322 D-P3DWA 44.5 23.5 D-M9V D-M9WV 40 35 D-A7 40 22 546 Auto Switch Mounting C(L)KU32 Series Auto Switch Mounting Bracket Part No.
Nil Nil Without auto switch c 20S 1 pc.