200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa
Bore size/Stroke (mm) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) Adjuster option FP Nil
Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set
Dimensions Y 4-Mounting hole for W LLHA--C Stations K A N G L3 L2 L1 Non-locking type Locking type 60 (H2) (H1) C U E R Pitch = B A (OUT) port n-P P (IN) port 2-P (mm) Dimensions (mm) B C E G H1 H2 K N P R U W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 50 31 65 20.5 10 85.5 87 18 27 Rc1/4, NPT1/4 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 37 90 25.5 19 112.5 114.5 39 37 Rc3/
VEX350 2 x C (Mounting hole) Silencer (P2) 2 x M6 x 1 x 9 AN210-02 (Option: N) (Except VEX3 00) Bracket mounting thread h (Grommet terminal) i (Conduit terminal) j (DIN terminal) 5 7 g (Grommet) A (Air operated) Port size Port 3 (R) Port 1 (P), 2 (A) 2 x port size Dimensions Port size A Model B C D E F G H J K L M N O 1 (P), 2 (A) 3 (R) VEX350 , , 1 1 2 3 4 123 96 107 112 26 30 70 90 50 60
Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type
Basic Style: CS1BQ Width across flats KA 4 x J 2 x P EA B C ZZ + Stroke S + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B C D E EA F G J K KA M MM N P S H ZZ 1/ 2 125 140 160 Up to 1000 50 47 145 115 36 90 59 43 16 M14 x 1.5 15 31 27 M30 x 1.5 35 98 110 235 1/ 2 Up to 1000 50 47 161 128 36 90 59 43 16 M14 x 1.5 15 31 27 M30 x 1.5 35 98 110 235 3/ 4 Up to 1200 56 53 182 144 40 90 59
h 25 E R T g d C J IN OUT G1/2 j f 2 x M Depth 5 J J IN OUT H G A 2 x P Port size B B1 2 x M Depth 5 H B1 G A 2 x P Port size B i b Faston type D 11 Q F Terminal part Faston connector 250 Series Bracket mounting hole dimensions a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) 11 E C R 9 6.5 6.5 IN OUT 15 2 x M Depth 5 H B B1 G A 10.5 2 x P Port size (mm) Model A B B1 C D E F G Port size P 1/4,
Approx. 300 Q F D D Approx. 300 Q F G1/2 Width across flats H Width across flats H C E C E R R B A 2 x P Port size 2 x P Port size B A M M 2 x J thread depth K 2 x J thread depth K DIN terminal: D Conduit terminal: T S Q F 34 D Cable 6 to 12 (Q) F G1/2 D 25 Width across flats H Width across flats H T C M C R R E E (S) A 2 x P Port size A 2 x P Port size B B M 2 x J thread depth K G1/2 2 x
Replacement Parts Description Material HNBR Y200-A Y220P-050S Y300-A Y320P-050S Y400-A Y420P-050S Y500-A Y520P-050S Seal Spacer with Bracket Center of F.R.L. body X-X C B G E E EE(Y120T, Y220T only) X X A Seal (Spacer width) J H F Y200T-A Y400T-A D K G 5.5 7 9 9 EE 33 E 24 35 40 40 D 53.4 71.5 86.1 89.6 C 29 41 48 48 H 15.5 19 26 26 B 67 82 96 96 J 3.5 4 5 5 K 30 41 50 50 A 3.2 4.2 5.2 5.2
N.O. + P.627 10-SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 23 (AR) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P.604 10-SYJ500 Push-turn locking lever type DIN terminal 1.2 23 (AR) 1/8 (SYJ500, 700 only) P.615 10-SYJ700 M8 connector 2.7 23 (AR) 1/8, 1/4 P.627 Note) All AC voltage models have built-in
/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port: Rc 1/8 5 24 VDC 12 VDC 5 6 9 Manual override Other Option Electrical entry Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Grommet L plug connector M plug connector DIN terminal
Switch Stop switch, Enable switch (Option) Cable length [m] 3 Enclosure IP64 (Except connector) Operating temperature range [C] 5 to 50 Option Enable switch is provided.
: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6
/10mm stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 13 140 18.5 39 51.5 118 136.5 5 12.5 20 22 40 43 13 13 137 15.5 36 50 115 13 133.5 12.5 52.5 50 48.5 ZPT25F10-0-A14 ZPT50F10-0-A14 141 19.5 40 119 137.5 6 13.5 25 28 50 53 ZPT32F10-0-A14 135.5 16 36.5 115.5 134 13 32 35 49 Additional dimensions by stroke(mm
Note 2) Refer to p.5.3-5 for lead wire length.
P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100
P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P
(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1 4/2 (P A/B) VQ5 2 position metal seal 1 2 VQ4 50 VQZ 4/2 5/3 (A/B EA/EB) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port size: Rc 3/8 Manifold Option Refer to pages 2-5-34 to 2-5-38 for detail dimensions of each option.
Dimensions Y 4 x Mounting hole for W LLHmA-mm-C Stations K A N G L3 L2 L1 Non-locking type Locking type 60 (H2) (H1) C U E R Pitch = B A (OUT) port n x P P (IN) port 2 x P (mm) Dimensions (mm) A B C E G H1 H2 K N P R U W Y Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 50 31 65 20.5 10 85.5 87 18 27 Rc1/4, NPT1/4 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 37 90 25.5 19 112.5 114.5 39