Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve [Torque: 0.1 Nm or less] Push-turn locking lever type [Type E] While pressing, turn in the direction of the arrow. If it is not turned, it can be operated in the same way as the non-locking push type. Locked position PUSH LOCK Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.
Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600
Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.
temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control
Vacuum (V) and exhaust (E) port should not be sealed simultaneously.
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2
Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.08 to 1.0, Specification: Built-in magnet
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.08 to 1.0, Specification: Built-in magnet
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 400, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 450, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification