5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

R ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 43.7

7

.) dimensions. 139 VXD Series For Air/Water/Oil 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless Steel Grommet 3 A VXD2 Port size 04 (1/2) (With bracket) 300 U E C 7.5 1.6 7.5 1.6 5.5 T A b a B 5.5 OUT IN OUT IN M b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (

ZP

P. 29 Bellows Series ZP Common adapter With pad Single unit Attachment Sponge Pad For adsorption of work pieces with bumps P. 30 4, 6 8, 10 15 Single unit S Sponge P. 31 With adapter Heavy-duty Pad 32, 300 340 Heavy-duty (Flat with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50

Slider Type/Ball Bushing Bearing

Note 2) Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 1529.) (For intermediate stops, refer to page 1527.)

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Aluminum High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Basic Type/Direct Mount Type

size determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Determination of allowable load mass & pressure (Refer to page 1466 for vertical operation.)

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

Guide Cylinder Series MGG

M 4 x O T Q 2 x P (Rc, NPT, G) AH AG S W K B U L I AL 4 x AK hole AP A R AA J V AI X AB Y + Stroke AJ Z + Stroke AG For 4 x AO MGJ AN MGP AI Cutout window AM MGQ 100 piston rod end connection MGG Mounting dimensions MGC MGF MGZ (mm) MGT Bore size (mm) 63 80 100 Stroke range (mm) A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O P 75, 100 125, 150 200, 250 300 200 25 25 228 250 158 180

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Cushion needle Q + Stroke PG MY1B P P (MY1HG) MY1H MY1H (Hexagon socket head taper plug) 1 (Hexagon socket head taper plug) QQ SS RR YH MY1B PP QQ RR SS A B H NE NH NF MY1M P P (MY1HG) P (Port) P (Port) PP (Hexagon socket head taper plug) (Hexagon socket head taper plug) G G MY1C TTT UU UU TT A N Z + Stroke MY1H P MY1 HT P (Port) (Hexagon socket head taper plug) MY1 W MY2C P P (Port) (Hexagon

SZ3000

R ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P= 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 43.7

Refrigerated Air Dryers

VAC specification] Power cable outlet (17) Drain tube (O.D. 10, length approx. 0.8 m) Dimensions [mm] Model Port size A B C D E F G H L M N P Q IDU8E Rc3/4 270 485 859 31 90 365 130 230 300 80 300 328 15 IDU11E 909 IDU15E1 Rc1 300 620 960 79 54 425 93 258 330 66 470 358 16 24 Refrigerant R407C (HFC) High Inlet Air Temperature IDUlE Series 22E, 37E, 55E, 75E (Inlet air temperature: 55C, Outlet

Electric Slide Tables

] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

ZP

P. 29 Bellows Series ZP Common adapter With pad Single unit Attachment Sponge Pad For adsorption of work pieces with bumps P. 30 4, 6 8, 10 15 Single unit S Sponge P. 31 With adapter Heavy-duty Pad 32, 300 340 Heavy-duty (Flat with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

to 500 mm/s 600 500 80 80 500 400 Load mass m (kg) Load mass m (kg) 400 63 63 300 300 200 50 50 200 40 40 32 25 20 100 32 25 20 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) Graph (3) up to 700 mm/s Selection Example: Vertical Upward Load Solid line: Operating pressure 0.4 MPa or more 300 80 q Selection

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(kg) 100 63 63 400 80 300 50 50 60 200 40 40 40 32 25 20 32 100 20 0 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 1 100 50 1000 Operating pressure P (MPa) Operating pressure P (MPa) Operating pressure P (MPa) Graph (6) up to 700 mm/s Selection Example: Load Extended Horizontally 400 80 350 w Selection conditions Mounting: Horizontal extrusion Maximum speed

Series AP500

Refer to gauge guide (P.94).

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke