VQZ1000/2000/3000

(2) Standard: 1W AC High pressure: 1W Low wattage: 0.5 W Series Configuration Model C [dm3/(s.bar)] b Cv C [dm3/(s.bar)] b Cv 4/2 5/3 (A/B EA/EB) 12 or less 15 or less 29 or less VQZ1120 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal 42 Single 12 or less 15 or less 34 or less VQZ1121 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 2 position 10 or less 13 or less 13 or less VQZ1220 0.13 0.26 0.54

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Manual override (Pitch) P = 10.5 9 (Pitch) P = 10.5 12.5 L2 3.5 L1 (Station n) (Station 1) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) 43.5 [50.5] + + + + + + + 28.1 A A B B 15 15 12 12 B B A A 1 1 3 3 (Pitch) P = 10.5 13.5 (Pitch) P = 10.5 M3 x 0.5 (A, B port) M3 x 0.5 (A, B port) 14.5 L plug connector (L) M plug connector (M) M8 connector (W0

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K A B TX TZ H + Stroke ZZ + 2 x strokes (mm) Bore size Stroke range A AL B C D E F G J V W K KA M MM (mm) (mm) -0125 25 to 1000 50 47 143 115 32 71 43 15 M14 x 1.5 15 17 15 27 13 M30x 1.5 0140 30 to 1000 50 47 157 128 32 71 43 15 M14 x 1.5 15 17 15 27 13 M30 x 1.5 0160 35 to 1200 56 I 53 177 14' 38 78.5 42 18 M16 x 1.5 15 20 17 34 15 M36 x 1.5 N P R 5 30.5 112 1 98 30.5 112 1.5 98 34.5 314

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Z + Stroke S + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) 28 28 NA 102.5 101.5 45 45 20 20 NB LB 21.5 23 Bore size A M4 x 0.7 D GC B F H NN Z WW WA WB X 6 6 MM GB GA C S LC 5.5 5.5 Y 9 9 LH 14 14 LT 2.3 2.3 LX 33 33 LY 25 25 LZ 42 42 15 15 16 10 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 29.5 29.5 4 5 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 M5 x 0.8 M12 x 1.0 5 B Air Cylinder CJ2 10-/1121

NCG/CG1

to 49 st 50 st or more 10 st or more 15 to 49 st 60 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 59 st 65 st or more 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 64 st 75 st or more 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st Trunnion style is not

LEC-OM069xx

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

SYJ300/500/700

M3 x 0.5 (P, R port) 15 (Bracket) 11 10 P R 22.1 6.7 1.2 (PE port) 7 9.2 L plug connector (L): SYJ32-L-M3 M plug connector (M): SYJ32-M-M3 M8 connector (WO): SYJ32-WO-M3 58.5 [60.7] (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) (2) 48.7 [50.9] 57.6 (2) 50.2 43.7 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to page 4-4-61 for dimensions

Title not found

Cable length (L) A1 (17.7) (10.2) 1 2 5 6 (14) (18) 1 3 5 8 A B C 1.5 m 3 m 5 m 8 m A6 B1 B3 A1 A3 B6 (13.5) 1 2 5.7 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 m LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C 15 m Actuator side Controller side 20 m 5.5 6.3 5.7 (14.2) Connector C (Terminal no.)

5 Port Solenoid Valve

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 628 Base Mounted Plug-in Unit VQC4000 Series P VQC4000 Kit (Flat ribbon cable kit) IP40 compliant VV5QC41 L2 L1 6.5 27 Indicator light 65.5 P = 25 Manual override SV SYJ A A A B A B A B A B A B 9 9 SZ A A A A A

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

10

(Detection at stroke end) and Its Mounting Height [mm] Auto Switch Proper Mounting Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5

Vacuum Unit

(Tightening torque: 0.15 Nm) 15) For products with a switch, mount the switch assembly. (Be careful not to drop the O-ring. Tightening torque: 0.08 to 0.10 Nm) Clip How to remove the junction box B The side with Connector recess square hole faces the body. Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Auto Switch Proper Mounting Position (mm) Auto switch model D-A72/A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7BAVL/F7BAL D-F7W/J79W D-F7WV/F79F D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-A9 D-A9V D-A73 D-A80 D-F7NTL D-A79W Bore size (mm) A B A B A B A B A B A B 12 16 20 32 40 50 9 7 13 11 11.5 12 17 9 9 9 9 13 13 11.5 12 17 17.5 18 23 15 7 9.5 10 15 15 7 19 11 18 18.5 23.5 15.5 9.5 12 12.5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

60534-1:2005 IEC 60534-2-3:1997 JIS B 2005-1:2012 JIS B 2005-2-3:2004 Equipment: JIS B 8471, 8472, 8473 Cv Process fluid control equipment 2.

ISO Standard Hydraulic Cylinder

4.5 7 6 8 10 14.5 A 15.5 24 24 26 29 32.5 B 9.5 12 11 13 15 19.5 A 16 16 18 21 24.5 B 4 3 5 7 11.5 A 12.5 12.5 14.5 17.5 21 B 0.5 0 1.5 3.5 8 A 16.5 16.5 18.5 21.5 25 B 4.5 3.5 5.5 7.5 12 32 40 50 63 80 100 32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.