Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

MXQ

B side traveling parallelism to A side Refer to Graph (1).

RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

SMC Pneumatic Clean Series

M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc.

3 Position Cylinder Series RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 3 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39 1.52

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

A 1.5 12 11 12 6.6 6.6 6H9 ( ) depth 6 +0.030 0 B A 32 11.5 32 11.5 G (NN 1) x H H B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170

MXS

MGC MGF CY1 q B MY1 Normally ON w * Adjust the switch position according to load and speed.

Title not found

l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

MXS Series Air Slide Table

7 2 38 12 6.6 11 12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Note) Refer to "Dimensions" of MXS25 on P. 64 for one with shock absorber as symmetric.

SMC Pneumatic Clean Series

Hs A 26 B A 29 B D-B54 D-K59 / G59 Auto switch Auto switch 12 approx. Hs 12 approx.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

70pvpump

Local Area: (800) 258-9200-www.stevenengineering.com Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

7

Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

SMC

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

3

16.5 19.5 B 7.5 9.5 10.5 10.5 14.0 17.0 A 33.0 32.0 34.0 27.5 31.5 32.0 B 12.5 14.5 15.5 15.5 19.0 22.0 A 26.5 25.5 27.5 21.0 25.0 25.5 B 6.0 8.0 9.0 9.0 12.5 15.5 A 27.5 26.5 28.5 22.0 26.0 26.5 B 7.0 9.0 10.0 10.0 13.5 16.5 B 4.5 6.5 7.5 7.5 11.0 14.0 A 27 20.5 24.5 25 B 8.5 8.5 12 15 20 25 32 40 50 63 Note) When setting an auto switch, confirm the operation and adjust its mounting

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.