MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

MY1

C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 26 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785 of Best Pneumatics No. 3.

Cylinder with Lock Double Acting, Single Rod Series CNS ø125, ø140, ø160 How to Order CNS L 100 125 D 100 M9BW D L 125 CDNS With auto switch With auto switch Number of auto switches (Built-in magnet) Nil 2 pcs. Mounting style S 1 pc. Basic style B Tubin

Mounting style Basic style Foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style B L F G C D T Tubing material Nil F Aluminum tube Steel tube Auto switch Nil Without auto switch Auto switches are not available with steel tube. Select applicable auto switch part numbers from the table below.

Air Cylinder Series CS2 ø125, ø140, ø160

Mounting Number of auto switches B L F G C D T Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion 2 pcs. 3 pcs. 1 pc. n pcs. Nil 3 S n Auto switch Nil Without auto switch Refer to the table below for the applicable auto switch model.

CLS

Cylinder with Lock Double Acting, Single Rod 125, 140, 160, 180, 200, 250 Series CLS How to Order CLS L D 125 100 M9B M9B With Auto Switch CDLS M9BW L D 125 100 With auto switch (Built-in magnet) Cylinder unit auto switch Port thread type Nil TN TF Lock unit auto switch Nil Without auto switch Mounting style B L F G Rc NPT G Nil Without auto switch Select applicable auto switches from the

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9BW Number of auto switches Mounting bracket Nil A B L F G D Both ends tapped 2 pcs.

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Rod end thread Male thread Female thread Long male rod end Nil F G Cushion CG1 Mounting Auto switch mounting bracket Note) N Rubber bumper B L F G D Basic Foot Rod flange Head flange Clevis Note) This symbol is indicated when the D-A9 or M9 type auto switch is specified. This mounting bracket does not apply to other auto switches (D-C7 and H7, etc.)

Round Type Hydraulic Cylinder ø 20, ø 25, ø 32, ø 40 CH  M Series

Nil S n B L F G C Basic type Axial foot type Rod flange type Head flange type Single clevis type Without auto switch Nil Auto switch type Bore size Select applicable auto switch models from the table below. 20 25 32 40 20 mm 25 mm 32 mm 40 mm Built-in Magnet Cylinder Model If a built-in magnet cylinder without auto switch is required, there is no need to enter the symbol for the auto switch

Hydraulic Cylinder

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked "" are produced upon receipt of order. You do not need to specify "N" (i.e., without lead wire) for D-A3, D-A44, D-G39, and D-K39.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Bore size Male thread Female thread Long male rod end Nil F G T E BZ FZ UZ 20 25 32 40 B L F G C D U Head trunnion Integral clevis Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Basic Foot Rod flange Head flange Single clevis Double clevis Rod trunnion 20 mm 25 mm 32 mm 40 mm G: Same rod end dimensions (A, AL, H) as CM2 series.

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 28 for details. For details about auto switches with pre-wired connector, refer to Best Pneumatics No. 3. Refer to CAT.ES20-201 catalog for the D-P3DW.

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M M9NWM 3 m L M9NWL 5 m Z M9NWZ 1

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

DLead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ For details about auto switches with pre-wired connector, refer to pages 1648 and 1649. Normally closed (NC = b contact) solid state auto switches (D-F9G/F9H types) are also available. Refer to page 1593 for details.