CG5-S

11 4 22 40 38.4 29 4 70.5 56 40 C type 10 for shaft 10 14 50, 63 IY-G04SUS 40 CG-E050SUS 9.6 41.6 36.2 1.55 1.15 40 12 15 5 25 50 59.6 35 6 106.5 84 50 C type 10 for shaft 14 22 80, 100 IY-G05SUS 50, 63 CG-E080SUS 13.4 50.6 44.2 2.05 1.15 60 14 23 6 40 80 87.2 57 9 144.5 120 80 C type 14 for shaft 18 IY-G08SUS 80 17 64 56.2 2.55 1.35 C type 18 for shaft 22 IY-G10SUS 100 21 72 64.2 2.55 1.35

Ionizer Gun

[mm] Distance [mm] 7) Supply pressure 0.6 MPa Consumed flow rate 450 L/min (ANR) 200 150 1.5s 100 50 1s 0.5s 0 -50 -100 -150 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] 19 Doc. no.IZ*-OMX0012-B 5-3.

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

IDX-OM-P023E

Change ground water to tap water.) b) Consult a water treatment consultant about how to treat the water. c) Change the cooling method from transient type to circulating type, and use applicable facility water.

IDX-OM-P026E

Change ground water to tap water.) b) Consult a water treatment consultant about how to treat the water. c) Change the cooling method from transient type to circulating type, and use applicable facility water.

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Function selection C-5 0h PC19 For manufacturer setting 0h PC20 *COP7 Function selection C-7 0h 5 5 5.

Modular F.R.L. Units

AD27-A With bowl guard AD27-C-A AD37-A AD47-A Normally open (N.O.)

Modular F.R.L. Unit

C Float type auto drain (N.O.)

Best Pneumatics Vol. 14

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Modular F.R.L. Units

Specifications Standard specifications Port size Specifications Model P1 P2 A B C D E F G H I 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 EXH IN OUT OUT EXH Model IN, OUT VHS20 VHS30 VHS40 VHS40-06 1/8 1/4 3/8 1/2 66.4 80.3 104.9 110.4 22.3 29.4 38.5 42 40 53 70 75 37.5 49 63 63 14 19 22 22 46.6 52 58 58 33.6 38 44 44 28 30 36 44 37.5 49 63 63 C(dm3/sbar) 2.4 3.3 6.4 8.3 7.3 10.9 14.2 18.3 C(dm3

MY1

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.

Thermo-chiller/Rack Mount Type

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Mechanically Jointed Rodless Cylinder Series MY1

MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4

Sine Rodless Cylinder Series REA

, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

0.4

Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.