Integrated Controller

[kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600

C85

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KW HR NA AM N1 F N2 Rail mounting type (A) Band mounting type (B) or non-magnet H S + Stroke F ZZ + Stroke C85KE Non-rotating, Piston rod (Rubber cushion only) With rod boot Wh KK C e KA K 9 Rod cross section 9 I f AM h (mm) BE KK EE N2 N1 ND h8 KW NA KA KV HR K G1 ZZ SW S G2 H C AM D F WH Bore 4 8 M4 x 0.7

C76

Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rail mounting Band mounting A B Built-in magnet MB Nil D None Built-in magnet

F

T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCT KCJ KCE KCL KCL P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R KCE KCU H O W T O O R D E R U N I O N E T O U C H F I T T I N G S KC S E A L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight plug U Y Connector E Bulkhead

Vacuum System Peripherals:

ZP Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Port size Rc Model Orifice dia.

JXCx-OMU0004

A B C A B C A B C 14 27 51 63 126 232 80 156 296 156 298 570 26 50.5 96 92.5 182 342 134. 263 501. 218 425 814 5 5 [N] 38 74 141 122 238 452 189 370 707 283 553 1058 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 *20%F.S.

VQ4000

(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1 4/2 (P A/B) VQ5 2 position metal seal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 VQ4 50 VQZ 4/2 5/3 (A/B EA/EB) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRBU2 U Mounting Shaft type Size Rotation U-X10 C RA1 CRB1 U Mounting Shaft type Size Rotation C-X11 C RA1 Both sides angle adjustable type MSU One side angle adjustable, one side cushion CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 Specifications

Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m), Number: S (1 pc.), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: Built-in, Mounting: Rod Trunnion, Bore Size: 20mm, Stroke: 75mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 1 pc., Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Prevents Micro-Bubbles

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N B A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

VM

E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Table of Contents

Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

KJ

(Option ) Multi-connector Socket side only Plug side only DMK6-23 DMK6S-23 DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 DMK6P-04 DMK12-23 DMK12S-23 DMK12P-23 12 DMK-C-12 DMK12-04 DMK12S-04 DMK12P-04 Specifications Applicable tubing materials Nylon, Soft nylon, Polyurethane Applicable tubing O.D.

NCA1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E LF + Stroke Bore size (in) MM KK A AA B BA C D DD E EA EE G J R WF Y LF P ZB 150 (1.5") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 1 1.71 3 5/8 2.36 4 3/4 2.02 200 (2") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 1.84 1 1.71 3 5/8 2.4 4 3/4 2.6 250 (2.5") 5/8 7/16-20

CE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 30 d Applicable bore size (mm) D C d D C B H Part no.

Compact

6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

VZ100/300/500

Flow Characteristics Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Flow characteristics 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] C [dm3/(sbar)] A, B Port 1(P), 3(R) Port M5 x 0.8 M5 x 0.8 0.13 0.13 0.13 0.1 0.03 0.03 0.22 0.22 0.074 0.15 0.048 0.052